Debbie Lee Jones

US Patent:

7221144, May 22, 2007

Filed:

Nov 30, 2005

Appl. No.:

11/289910

Inventors:

Ertugrul Berkcan - Clifton Park NY, US
Shankar Chandrasekaran - Tamil Nadu, IN
Christopher James Kapusta - Delanson NY, US
Laura Jean Meyer - Schenectady NY, US
Glenn Scott Claydon - Wynantskill NY, US
Debbie Gahaton Jones - Berkeley CA, US
Anis Zribi - Rexford NY, US

Assignee:

General Electric Company - Niskayuna NY

International Classification:

G01R 31/00

US Classification:

324126, 324117 R

Abstract:

A micro-electromechanical system (MEMS) based current & magnetic field sensor includes a MEMS-based magnetic field sensing component a structural component comprising a silicon substrate and a compliant layer comprising a material selected from the group consisting of silicon dioxide and silicon nitride, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field, and a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.

US Patent:

7508189, Mar 24, 2009

Filed:

Apr 11, 2007

Appl. No.:

11/733896

Inventors:

Ertugrul Berkcan - Clifton Park NY, US
Shankar Chandrasekaran - Tamil Nadu, IN
Christopher James Kapusta - Delanson NY, US
Laura Jean Meyer - Schenectady NY, US
Glenn Scott Claydon - Wynantskill NY, US
Debbie Gahaton Jones - Berkeley CA, US
Anis Zribi - Rexford NY, US

Assignee:

General Electric Company - Niskayuna NY

International Classification:

G01R 31/00

US Classification:

324126, 327117 R

Abstract:

A micro-electromechanical system current and magnetic field sensor is presented. The micro-electromechanical system current and magnetic field sensor is configured to sense a magnetic field produced by a current carrying conductor. The sensor includes a structural component comprising a substrate and a compliant layer, a magnetic-to-mechanical converter coupled to the structural component to provide a mechanical indication of the magnetic field. The sensor further includes a strain responsive component coupled to the structural component to sense the mechanical indication and to provide an indication of the current in the current carrying conductor in response thereto.