Dennis W. Wagner - Austin TX Michael T. Wauk - West Sussex, GB Matthew D. Scotney Castle - Austin TX Babak Adibi - Santa Clara CA
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
H01L 21425
US Classification:
438514
Abstract:
An apparatus and method for implanting a desired chemical species in a semiconductor substrate. The apparatus comprises a target chamber, a holder to hold a substrate in the target chamber for implantation, a pump to pump the target chamber down to a desired pressure, a pressure lock to enable a substrate to be passed into the target chamber for loading on the holder while the target chamber is at sub-atmospheric pressure, an ion beam generator for generating and directing a beam of ions containing said desired species at a surface of a substrate on said holder, and a reactive gas supply to feed a reactive gas into the target chamber while the chamber is maintained by the pump at the desired pressure, to provide a desired partial pressure of the reactive gas in the target chamber to reactive with and volatilise unwanted contaminants on surfaces in the target chamber.
IU Health PhysiciansIndiana University School Of Medicine Anesthesia 550 University Blvd, Indianapolis, IN 46202 (317)2740275 (phone), (317)2740256 (fax)
Education:
Medical School Indiana University School of Medicine Graduated: 1977
Languages:
English
Description:
Dr. Wagner graduated from the Indiana University School of Medicine in 1977. He works in Indianapolis, IN and specializes in Anesthesiology. Dr. Wagner is affiliated with IU Health University Hospital.
it was accidental, but it was later revealed that one biologist had lured Macho B by placing feces from a captive female jaguar in heat along a trail the animal was known to frequent. (The Arizona Republics Dennis Wagner has a fascinating and comprehensive account of the capture and cover-up here.)
by the national press, in December last year, when Dr. Sam Foote, a doctor of internal medicine at the Phoenix VA, retired and began meeting with Arizona Republic reporter Dennis Wagner with detailed allegations that patients were placed on a secret waiting list and several died while awaiting care.
Date: May 21, 2014
Category: U.S.
Source: Google
Vitamin D3 - a Raw Material the Body Needs to Fight Prostate Cancer
* Dennis Wagner, Larisa Nonn, Angeline Antonio, Avani Vaishnav, Laurence Klotz, Neil Fleshner, Antonio Finelli, Dominique Trudel, Theodorus Van der Kwast, Reinhold Vieth. University of Toronto/Mount Sinai Hospital, Toronto, ON, Canada; University of Illinois at Chicago, Chicago, IL; Sunnybrook