John A Roth

US Patent:

7253091, Aug 7, 2007

Filed:

Sep 26, 2002

Appl. No.:

10/256336

Inventors:

Peter D. Brewer - Westlake Village CA, US
Michael G. Case - Thousand Oaks CA, US
Andrew T. Hunter - Woodland Hills CA, US
Mehran Matloubian - Encino CA, US
John A. Roth - Ventura CA, US
Carl W. Pobanz - Rancho Palos Verdes CA, US

Assignee:

HRL Laboratories, LLC - Malibu CA

International Classification:

H01L 21/4763
H01L 23/34

US Classification:

438618, 438622, 438109, 438928, 438459, 257777, 257723, 257686, 257E21705

Abstract:

A method for assembling an electronic system with a plurality of layers. Recesses in formed in one or more dielectric layers and electronic components are positioned within the recesses. One or more layers containing the components are placed on a host substrate containing host circuits. Electrical interconnects are provided between and among the electronic components in the dielectric layers and the host circuits. The layers containing the components may also be provided by growing the electronic devices on a growth substrate. The growth substrate is then removed after the layer is attached to the host substrate.

US Patent:

56831803, Nov 4, 1997

Filed:

Sep 13, 1994

Appl. No.:

8/305129

Inventors:

Terence J. De Lyon - Newbury Park CA
John A. Roth - Ventura CA

Assignee:

Hughes Aircraft Company - Los Angeles CA

International Classification:

G01K 1100

US Classification:

374161

Abstract:

A method and apparatus for enabling the use of optical techniques for temperature measurement of a semiconducting substrate coated with an optically opaque overlayer. A reflective mirror structure is inserted between the semiconducting substrate and the optically opaque overlayer. The reflective structure prevents the overlayer from absorbing light transmitted through the semiconducting substrate and instead reflects the light, thereby restoring the substrate front-surface reflectivity required for temperature measurement analysis by optical techniques such as absorption edge reflectance spectroscopy.

US Patent:

52987590, Mar 29, 1994

Filed:

Feb 19, 1993

Appl. No.:

8/019965

Inventors:

Peter D. Brewer - Newbury Park CA
John A. Roth - Ventura CA

Assignee:

Hughes Aircraft Company - Los Angeles CA

International Classification:

G21K 500

US Classification:

2504921

Abstract:

Ultraviolet (UV) light from a lamp (12) or laser (38) is provided for cracking Group V and Group VI species comprising clusters (dimers and tetramers) or metal-organic molecules to form monomers (atoms). The UV radiation interacts with a molecular beam (14) of Group V and Group VI species following their generation in a source cell (16), which may be an effusion source in molecular beam epitaxy (MBE) apparatus, a thermal cracker cell in gas-source MBE apparatus, or a gas injector cell in metal-organic MBE apparatus (MOMBE). As configured, the UV light source and associated elements comprise a unit, termed herein a "photo-cracker cell" (10). The photo-cracker cell includes an elliptical reflective cavity (18), which defines two foci. The source of UV light is located along one focus and the path of the molecular beam is located along the other focus substantially parallel thereto. The photo-cracker cell may be provided on existing MBE or MOMBE apparatus, between the present source cell and the growth chamber (36) in which III-V, IV, and II-VI semiconductor layers on substrates are deposited.