Kevin P Peck

US Patent:

59044780, May 18, 1999

Filed:

Mar 7, 1997

Appl. No.:

8/814723

Inventors:

Robert A. Weaver - Whitefish MT
William McEntire - Sonora CA
Kevin Peck - Soulsbyville CA

Assignee:

Semitool, Inc. - Kalispell MT

International Classification:

F27D3/12

US Classification:

432241

Abstract:

A vertically oriented thermal processor for processing batches of semiconductor wafers held within a processing chamber. The processing chamber is contained within a processing vessel. A furnace liner surrounds the processing vessel in spaced relationship. A flow path for cooling fluid is supplied between the furnace liner and an inner wall of the furnace heater. The flow occurs through end and base segments forming part of the furnace heating enclosure. The end and base segments have interior ports which communicate with a manifold chamber. The manifold chamber is advantageously divided into inner and outer chambers by shields which reflect radiant heat. The inner and outer manifold chambers are connected by manifold connecting passages formed between the shields.

Address:

11 Clark Ln, Palm Coast, FL 32137

Phone:

(386)4470329

VIN:

KL1TD56637B045160

Make:

CHEVROLET

Model:

AVEO

Year:

2007