Kyle D Hanson

US Patent:

6368475, Apr 9, 2002

Filed:

Mar 21, 2000

Appl. No.:

09/531828

Inventors:

Kyle M. Hanson - Kalispell MT
Scott Grace - Kalispell MT
Matt Johnson - Kalispell MT
Ken Gibbons - Kalispell MT

Assignee:

Semitool, Inc. - Kalispell MT

International Classification:

C25B 900

US Classification:

2042751, 204263, 204252

Abstract:

A reactor for use in electrochemical processing of a microelectronic workpiece is set forth and described herein. The apparatus comprises one or more walls defining a processing space therebetween for containing a processing fluid. The processing space includes at least a first fluid flow region and a second fluid flow region. A first electrode is disposed in the processing fluid of the first fluid flow region while a second electrode, comprising at least a portion of the microelectronic workpiece, is disposed in the processing fluid of the second fluid flow region. Fluid flow within the first fluid flow region is generally directed toward the first electrode and away from the second electrode while fluid flow within the second fluid flow region is generally directed toward the second electrode and away from the first electrode. Depending on the particular electrochemical process that is to be executed, the first electrode may constitute either an anode or a cathode in the electrochemical processing of the microelectronic workpiece.

US Patent:

6409892, Jun 25, 2002

Filed:

Aug 30, 1999

Appl. No.:

09/385342

Inventors:

Daniel J. Woodruff - Kalispell MT
Kyle M. Hanson - Kalispell MT

Assignee:

Semitool, Inc. - Kalispell MT

International Classification:

C25B 900

US Classification:

204242, 204275, 204286, 204297 R, 204224 R

Abstract:

An improved anode, cup and conductor assembly for a reactor vessel includes an anode assembly supported within a cup which holds a supply of process fluid. The cup is supported around its perimeter within the reactor vessel. The anode assembly has an anode shield carrying an anode. The anode shield and the anode are supported from below by a delivery tube which also serves to deliver process fluid to the cup. A bayonet connection is provided between a top portion of the delivery tube and the anode assembly. The fluid delivery tube has a fixed height within the vessel. The anode elevation is adjusted by the interposing of a spacer of desired thickness between the anode and the tube. An electrical conductor is connected to the anode, and passes through the tube to be electrically accessible outside the vessel. The conductor is connected to the anode with a plug-in connection which is completed when the tube is coupled to the anode by the bayonet connection. The spacer is C-shaped to allow changing of the spacer for anode height adjustments without disconnecting the plug-in connection.

US Patent:

6428660, Aug 6, 2002

Filed:

Mar 15, 2001

Appl. No.:

09/811379

Inventors:

Daniel J. Woodruff - Kalispell MT
Kyle M. Hanson - Kalispell MT

Assignee:

Semitool, Inc. - Kalispell MN

International Classification:

C28D 1700

US Classification:

204224R, 2042751, 204242, 204279

Abstract:

An improved anode, cup and conductor assembly for a reactor vessel includes an anode assembly supported within a cup which holds a supply of process fluid. The cup is supported around its perimeter within the reactor vessel. The anode assembly has an anode shield carrying an anode, the anode shield having upwardly extending brackets with radially extending members. A diffusion plate is supported above the anode by the anode brackets using first bayonet connections. The anode shield and the anode are supported from below by a delivery tube which also serves to deliver process fluid to the cup. A second bayonet connection is provided between a top portion of the delivery tube and the anode assembly. The fluid delivery tube has a fixed height within the vessel. The anode elevation is adjusted by the interposing of a spacer of desired thickness between the anode and the tube.

US Patent:

6428662, Aug 6, 2002

Filed:

Aug 30, 1999

Appl. No.:

09/385185

Inventors:

Daniel J. Woodruff - Kalispell MT
Kyle M. Hanson - Kalispell MT

Assignee:

Semitool, Inc. - Kalispell MT

International Classification:

C25B 900

US Classification:

2042751, 118429

Abstract:

An improved anode, cup and conductor assembly for a reactor vessel includes an anode assembly supported within a cup which holds a supply of process fluid. The cup is supported around its perimeter within the reactor vessel. The anode assembly has an anode shield carrying an anode. The anode shield and the anode are supported from below by a delivery tube which also serves to deliver process fluid to the cup. A bayonet connection is provided between a top portion of the delivery tube and the anode assembly. The fluid delivery tube has a fixed height within the vessel. The anode elevation is adjusted by the interposing of a spacer of desired thickness between the anode and the tube. An electrical conductor is connected to the anode, and passes through the tube to be electrically accessible outside the vessel. The conductor is connected to the anode with a plug-in connection which is completed when the tube is coupled to the anode by the bayonet connection.

US Patent:

6471460, Oct 29, 2002

Filed:

Jul 7, 2000

Appl. No.:

09/611860

Inventors:

John M. Pedersen - Kalispell MT
Kyle M. Hanson - Kalispell MT

Assignee:

Semitool, Inc. - Kalispell MT

International Classification:

B65G 4907

US Classification:

41422209, 414940, 4147495

Abstract:

An apparatus is set forth for providing access to individual workpiece positions in a microelectronic workpiece cassette. The assembly comprises a workpiece cassette inventory assembly having a plurality of cassette inventory cassette supports, which are selectively aligned with the staging cassette supports of a workpiece staging assembly. This allows a plurality of cassettes to be separately indexed, thereby enabling the workpiece staging assembly to access multiple cassettes and process a larger number of microelectronic workpieces between loading/unloading cycles that require user activity.

US Patent:

6497801, Dec 24, 2002

Filed:

Jul 10, 1998

Appl. No.:

09/113418

Inventors:

Daniel J. Woodruff - Kalispell MT 59901
Kyle M. Hanson - Kalispell MT 59901

International Classification:

C25D 550

US Classification:

2042302, 204224 R, 204269, 204272, 204275

Abstract:

An electroplating apparatus includes a reactor vessel having a segmented anode array positioned therein for effecting electroplating of an associated workpiece such as a semiconductor wafer. The anode array includes a plurality of ring-like anode segments which are preferably positioned in concentric, coplanar relationship with each other. The anode segments can be independently operated to create varying electrical potentials with the associated workpiece to promote uniform deposition of electroplated metal on the surface of the workpiece.

US Patent:

6527926, Mar 4, 2003

Filed:

Mar 13, 2001

Appl. No.:

09/805502

Inventors:

Daniel J. Woodruff - Kalispell MT
Kyle M. Hanson - Kalispell MT
James T. Kuechmann - Kalispell MT

Assignee:

Semitool, Inc. - Kalispell MT

International Classification:

C25B 900

US Classification:

20429708, 20429709, 2042971, 20429714

Abstract:

An apparatus for electroplating a workpiece is disclosed in which the apparatus includes a workpiece holding structure. The workpiece holding structure includes a workpiece support having at least one surface that is disposed to engage a front side of the workpiece and at least one electrical contact disposed for contact with at least one corresponding electrical contact on a back-side of the workpiece. The workpiece includes one or more electrically conductive paths between the at least one corresponding electrical contact and a front-side of the workpiece to facilitate electroplating of the front-side surface. An actuator is provided for driving the workpiece support between a first position in which the at least one electrical contact of the workpiece and the at least one contact of the workpiece holding structure are disengaged from one another, and a second position in which the at least one surface clamps the workpiece in a position in which the at least one electrical contact of the workpiece holding structure electrically engages the at least one electrical contact of the workpiece.

US Patent:

6547937, Apr 15, 2003

Filed:

Jan 3, 2000

Appl. No.:

09/476526

Inventors:

Thomas H. Oberlitner - Kalispell MT
Kyle M. Hanson - Kalispell MT

Assignee:

Semitool, Inc. - Kalispell MT

International Classification:

C25D 1700

US Classification:

204224R, 204222, 204245

Abstract:

An integrated tool is provided including at least one workpiece processing station having a paddle assembly. In accordance with one aspect of the invention, the workpiece processing station is adapted for adjusting the level of the processing fluid relative to a workpiece, wherein the portion of the workpiece to be processed and possibly the paddle is selectively immersed within the processing fluid. In accordance with a further aspect of the invention, a paddle is provided for use proximate to a workpiece in a workpiece processing station. The paddle includes a one or more sets of delivery ports and one or more sets of fluid recovery ports. In at least one embodiment, the paddle provides for agitation of a processing fluid proximate to the surface of the workpiece. In at least another embodiment, the paddle provides for the delivery and/or recovery of one or more fluids to the portion of the workpiece to be processed. One aspect of the present invention enables the fluids supplied to the workpiece by the paddle to be limited to the space located between the workpiece and the paddle, thus avoiding mixing of these fluids with the processing fluid located within the bowl assembly not supplied by the paddle.