Pamela Kunkel

US Patent:

20060105683, May 18, 2006

Filed:

Nov 8, 2005

Appl. No.:

11/270703

Inventors:

James Weygand - Carver MN, US
Pamela Kunkel - Norwood MN, US
Gregory Thomes - Chaska MN, US

International Classification:

B24C 1/00
B24C 5/04

US Classification:

451040000, 451102000

Abstract:

Improved nozzle design that discharges fluid streams through a series of nozzle orifices distributed along a length of the nozzle. The present invention may be incorporated into a wide range of microelectronic device manufacturing processes and equipment types for which an array of process streams are desired for treating microelectronic workpieces. The present invention is particularly useful to cryogenically clean microelectronic workpieces.

US Patent:

59420375, Aug 24, 1999

Filed:

Dec 23, 1996

Appl. No.:

8/773489

Inventors:

Thomas J. Wagener - Shorewood MN
Kevin L. Siefering - Chaska MN
Pamela A. Kunkel - Cologne MN
James F. Weygand - Excelsion MN
Gregory P. Thomes - Chaska MN

Assignee:

FSI International, Inc. - Chaska MI

International Classification:

B05B 706

US Classification:

118315

Abstract:

A nozzle having a series of orifices along a longitudinal length of the nozzle for processing a substrate and which is rotatably adjustable. By the nozzle design of the present invention, liquid is properly distributed along the longitudinal length of the nozzle independently of the angle of the aerosol spray. This allows for the generation of a uniform aerosol stream that is independent of spray angle. The nozzle design of the present invention improves the uniform distribution of liquid within the nozzle, which in addition to providing a more uniform liquid pooling, also substantially eliminates temporal non-uniformities across the nozzle length. Moreover, the present invention is also directed to a nozzle that is translatable in the direction toward or away from the substrate to be processed or parallel to the substrate surface. The nozzle includes a series of impingement orifices provided in a longitudinal direction along at least a part of the nozzle, wherein the nozzle has an interior longitudinally divided into first and second internal cavities with plural openings between the first and second internal cavities, and the openings between the first and second cavities are oriented at a different radial angle from the longitudinal axis than the radial angle of the impingement orifices. Preferably, the nozzle comprises an inner tube and an outer tube operatively supported and connected with respect to one another.