Patricia A Richard

US Patent:

53998979, Mar 21, 1995

Filed:

Nov 29, 1993

Appl. No.:

8/158679

Inventors:

Brian T. Cunningham - Watertown MA
Patricia V. Richard - North Billerica MA

Assignee:

Raytheon Company - Lexington MA

International Classification:

H01L 2714
H01L 3100

US Classification:

257467

Abstract:

An integrated circuit having a semiconductor layer having formed therein a electronic circuit. An electrical device, electrically connected to the electronic circuit, has a corrugated platform supported over, displaced from, and integrally formed with, the substrate. In a preferred embodiment the electrical device is a bolometer and the electronic circuit is a read out circuit for the device. The platform includes a surface member and a leg, a proximate end of the leg being disposed on the substrate and the distal end being elevated from the substrate and terminating at the surface member. Preferably the leg and the surface member are corrugated. The supporting surface has a corrugation parallel with the leg. The surface member is supported, as a corrugated air-bridge, over the surface of the substrate by corrugated legs. The temperature sensitive resistive material is formed over the corrugated surface member.