Rong Liu

US Patent:

8284815, Oct 9, 2012

Filed:

Oct 9, 2009

Appl. No.:

12/577077

Inventors:

Hong Ye - San Diego CA, US
Alex Ershov - Escondido CA, US
Rajasekhar Rao - San Diego CA, US
Daniel Brown - San Diego CA, US
Slava Rokitski - La Jolla CA, US
Rong (Lauren) Liu - San Diego CA, US
Ray Cybulski - San Diego CA, US
James J. Ferrell - Temecula CA, US
Robert Bergstedt - Carlsbad CA, US
John Viatella - San Diego CA, US
Thomas Duffey - San Diego CA, US

Assignee:

Cymer, Inc. - San Diego CA

International Classification:

H01S 3/08
G02B 5/04

US Classification:

372100, 372105, 359831, 359833, 359834, 359835, 359836

Abstract:

An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.

US Patent:

20120307858, Dec 6, 2012

Filed:

Aug 17, 2012

Appl. No.:

13/588170

Inventors:

Hong Ye - San Diego CA, US
Alex Ershov - Escondido CA, US
Rajasekhar Rao - San Diego CA, US
Daniel Brown - San Diego CA, US
Slava Rokitski - La Jolla CA, US
Rong (Lauren) Liu - San Diego CA, US
Ray Cybulski - San Diego CA, US
James J. Ferrell - Temecula CA, US
Robert Bergstedt - Carlsbad CA, US
John Viatella - San Diego CA, US
Thomas Duffey - San Diego CA, US

International Classification:

H01S 3/083
G02B 5/04

US Classification:

372 94, 359834

Abstract:

An aspect of the disclosed subject matter includes a method of reducing the laser absorption of a beam reverser prism consisting of at least one of the following: increasing a first distance between a first incident point and a chamfered corner, wherein the first incident point is on a first reflective surface of the prism and the chamfered corner is formed between the first reflective surface and a second reflective surface of the prism, wherein the chamfered corner has a chamfered surface; increasing a second distance between a second incident point and the chamfered corner, wherein the second incident point is on the second reflective surface of the prism; and increasing a reflectivity of the chamfered surface of the chamfered corner of the prism. A method of determining a prime cut for an optical component is also disclosed. A laser including at least one prime cut optical component is also disclosed.