Steven A Green

US Patent:

6483586, Nov 19, 2002

Filed:

Sep 10, 2001

Appl. No.:

09/950036

Inventors:

Blaine D. Johs - Lincoln NE
Craig M. Herzinger - Lincoln NE
Steven E. Green - Lincoln NE
Jeffrey S. Hale - Lincoln NE

Assignee:

J. A. Woollam Co. Inc. - Lincoln NE

International Classification:

G01N 2121

US Classification:

356369

Abstract:

Disclosed is a rotating compensator sample system investigation system which includes a source of a beam of electromagnetic radiation, a polarizer, a stage for supporting a sample system, a beam splitting analyzer, and at least two detector systems which are positioned each to intercept a different of the at least two electromagnetic beams which emerge from the beam splitting analyzer. Also disclosed is a regression based approach to calibration which simultaneously extracts a sample system PSI and DELTA.

US Patent:

6535286, Mar 18, 2003

Filed:

Mar 21, 2000

Appl. No.:

09/531877

Inventors:

Steven E. Green - Lincoln NE
Gerald Cooney - Lincoln NE

Assignee:

J.A. Woollam Co. Inc. - Lincoln NE

International Classification:

G01J 400

US Classification:

356369, 356367, 356364

Abstract:

Disclosed are spectrophotometer, polarimeter, and ellipsometer systems which have multiple easily, sequentially, positionable detector systems therein mounted to allow easy positioning thereof, to for instance, allow sequential monitoring of ellipsometric and spectrophotometric signals, without removal of any detector system from the spectrophotometer, polarimeter, or ellipsometer system. Also disclosed are methods of use wherein-different detectors in a positionable multiple detector containing system are utilized during different electromagnetic beam detection steps.

US Patent:

6795184, Sep 21, 2004

Filed:

Sep 26, 2001

Appl. No.:

09/963573

Inventors:

Craig M. Herzinger - Lincoln NE
Steven E. Green - Lincoln NE
Blaine D. Johs - Lincoln NE

Assignee:

J.A. Woollam Co., INC - Lincoln NE

International Classification:

G01J 400

US Classification:

356369, 356364, 356365, 356368

Abstract:

Disclosed is an odd bounce image rotating system with a sequence of an odd number of reflecting elements, such that a polarized electromagnetic beam caused to enter, reflectively interacts with the odd number of reflecting elements and exits along an essentially non-deviated, non-displaced locus, but with an azimuthally rotated polarization state. Application to, and methodology of application to set azimuthal angles of polarization in spectroscopic ellipsometer, polarimeter and the like systems is also disclosed.

US Patent:

6831740, Dec 14, 2004

Filed:

Aug 9, 2001

Appl. No.:

09/862881

Inventors:

Craig M. Herzinger - Lincoln NE
Steven E. Green - Lincoln NE
Ronald A. Synowicki - Lincoln NE

Assignee:

J.A. Woollam Co. Inc. - Lincoln NE

International Classification:

G01J 342

US Classification:

356319, 356323, 356332

Abstract:

Disclosed are spectrophotometer systems and methodology for obtaining data of improved precision therefrom, including replacement of data determined to be suspect based on comparison of multiple baselines.

US Patent:

6982792, Jan 3, 2006

Filed:

Feb 28, 2003

Appl. No.:

10/376677

Inventors:

John A. Woollam - Lincoln NE, US
Steven E. Green - Lincoln NE, US
Ping He - Lincoln NE, US
Blaine D. Johs - Lincoln NE, US
Craig M. Herzinger - Lincoln NE, US
Galen L. Pfeiffer - Lincoln NE, US
Brian D. Guenther - Lincoln NE, US
Martin M. Liphardt - Lincoln NE, US

Assignee:

J.A. Woollam Co. INC - Lincoln NE

International Classification:

G01J 4/00

US Classification:

356369

Abstract:

Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.

US Patent:

7075649, Jul 11, 2006

Filed:

Sep 4, 2001

Appl. No.:

09/945962

Inventors:

Blaine D. Johs - Lincoln NE, US
Craig M. Herzinger - Lincoln NE, US
Steven E. Green - Lincoln NE, US
Jeffrey S. Hale - Lincoln NE, US

Assignee:

J.A. Woollam Co. - Lincoln NE

International Classification:

G01J 4/00

US Classification:

356369

Abstract:

Disclosed are spectroscopic ellipsometer and combined spectroscopic reflectometer/ellipsometer systems. The spectroscopic ellipsometer system portion includes polarizer and analyzer elements which remain fixed in position during data acquisition, and a step-wise rotatable compensator electromagnetic beam transmitting means, which serves to enable imposing a plurality of sequentially discrete, rather than continuously varying, polarization states on said beam of electromagnetic radiation. Further disclosed is a calibration procedure for said spectroscopic ellipsometer system portion of the invention which involves the gathering of, for each of a plurality of ellipsometrically distinct sample systems, spectroscopic data at a sequential plurality of discrete electromagnetic radiation beam polarization states, combined with providing of a mathematical model of the spectroscopic ellipsometer system and application of a mathematical regression procedure.

US Patent:

7136162, Nov 14, 2006

Filed:

Oct 12, 2003

Appl. No.:

10/684088

Inventors:

Martin M. Liphardt - Lincoln NE, US
Craig M. Herzinger - Lincoln NE, US
Brian D. Guenther - Lincoln NE, US
Steven E. Green - Lincoln NE, US
Galen L. Pfeiffer - Lincoln NE, US
Ping He - Lincoln NE, US

Assignee:

J.A. Woollam Co., Inc. - Lincoln NE

International Classification:

G01J 4/00

US Classification:

356369

Abstract:

Disclosed is a system and method of aligning, preferably by an automated procedure, a beam of electromagnetic radiation provided by a source thereof so that it approaches a sample at a specific location upon its surface, at a known angle, then reflects therefrom and enters a data detector.

US Patent:

7151605, Dec 19, 2006

Filed:

Dec 11, 2004

Appl. No.:

11/009489

Inventors:

Craig M. Herzinger - Lincoln NE, US
Steven E. Green - Lincoln NE, US
Ronald A. Synowicki - Lincoln NE, US
James D. Welch - Omaha NE, US

Assignee:

J.A. Woollam Co., Inc - Lincoln NE

International Classification:

G01J 4/00

US Classification:

356369

Abstract:

Disclosed is methodology for obtaining data of improved precision, including detection and replacement of data determined to be suspect to provide good data over a spectroscopic range of wavelengths.