Brian R Jenkins

US Patent:

8372651, Feb 12, 2013

Filed:

Apr 5, 2007

Appl. No.:

11/696797

Inventors:

Amy M. Tseng - Woodridge IL, US
John E. Hoots - Batavia IL, US
Brian V. Jenkins - Warrenville IL, US

Assignee:

Nalco Company - Naperville IL

International Classification:

G01N 21/75

US Classification:

436166, 436 55, 436103, 436104, 436163, 436164, 134 13, 134 2, 134 254

Abstract:

A method of monitoring a surfactant in a microelectronic process is disclosed. Specifically, the monitoring of a surfactant occurs by studying the absorbance of a sample collected from a microelectronic process.

US Patent:

20130183773, Jul 18, 2013

Filed:

Dec 31, 2012

Appl. No.:

13/731296

Inventors:

Amy M. Tseng - Woodridge IL, US
Brian V. Jenkins - Warrenville IL, US
Robert Mack - Milwaukie OR, US

International Classification:

G01N 31/22

US Classification:

438 8, 436101

Abstract:

The invention is directed towards methods and compositions for identifying the amount of hydrofluoric acid in a buffered oxide etching composition. In buffered oxide etching compositions it is very difficult to measure the amount of hydrofluoric acid because it has varying equilibriums and it is toxic so it hard to handle and sample. When used to manufacture microchips however, incorrect amounts of hydrofluoric acid will ruin those chips. The invention utilizes a unique method of spectrographically measuring the hydrofluoric acid when in contact with added chromogenic agents to obtain exact measurements that are accurate, immediate, and safe.