- Cupertino CA, US Simon BOVET - Zurich, CH Eric M. G. CIRCLAEYS - Los Gatos CA, US Bruno J. CONEJO - New York NY, US Kaely COON - San Francisco CA, US Alan C. DYE - San Francisco CA, US Craig M. FEDERIGHI - Los Altos Hills CA, US Woosung KANG - San Jose CA, US Chia Yang LIN - San Francisco CA, US Matthieu LUCAS - San Francisco CA, US Charles A. MEZAK - Fairfield CT, US Pavel PIVONKA - San Francisco CA, US Andre SOUZA DOS SANTOS - San Jose CA, US Denys STAS - Santa Clara CA, US
International Classification:
G06F 3/04847 G06F 3/16 G06F 3/0482 G06F 3/04883
Abstract:
The present disclosure generally relates to user interfaces for navigating, viewing, and editing content items, including aggregated content items.
Detection Of Buried Features By Backscattered Particles
- Veldhoven, NL Chia Wen LIN - Saratoga CA, US Zhongwei CHEN - San Jose CA, US Chang-chun YEH - Miaoli County, TW
International Classification:
H01J 37/244 H01J 37/22
Abstract:
Disclosed herein an apparatus and a method for detecting buried features using backscattered particles. In an example, the apparatus comprises a source of charged particles; a stage; optics configured to direct a beam of the charged particles to a sample supported on the stage; a signal detector configured to detect backscattered particles of the charged particles in the beam from the sample; wherein the signal detector has angular resolution. In an example, the methods comprises obtaining an image of backscattered particles from a region of a sample; determining existence or location of a buried feature based on the image.