Chun Hsiang Chang from Sugar Land, TX, age 62

Medicine Doctors

Chun Joey Chang

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Specialties:

Physical Medicine & Rehabilitation

Us Patents

Method Of Controlling The Differential Dissolution Rate Of Photoresist Compositions, Polycyclic Olefin Polymers And Monomers Used For Making Such Polymers
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US Patent:

7341816, Mar 11, 2008
Filed:

Feb 20, 2004
Appl. No.:

10/783174
Inventors:

Larry F. Rhodes - Silver Lake OH, US
Chun Chang - Stow OH, US
Leah J. Langsdorf - Akron OH, US
Howard A. Sidaway - Brecksville OH, US
Hiroshi Ito - San Jose CA, US
Assignee:

Promerus, LLC - Brecksville OH
International Business Machines Corporation - Armonk NY
International Classification:

G03F 7/004
US Classification:

4302701, 430905
Abstract:

A photoresist composition encompassing a polymer having at least one polycyclic olefin repeat unit having a desired exo mole percent is provided, where the repeat unit is derived from a polycyclic olefin monomer having the desired exo mole percent. Such polymers having such repeat units having a desired exo mole percent offer control of differential dissolution rate and hence provide enhanced imaging properties. Exemplary monomers having a desired exo mole percent are also provided.

Method Of Controlling The Differential Dissolution Rate Of Photoresist Compositions, Polycyclic Olefin Polymers And Monomers Used For Making Such Polymers
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US Patent:

7608382, Oct 27, 2009
Filed:

Oct 31, 2007
Appl. No.:

11/981617
Inventors:

Larry F. Rhodes - Silver Lake OH, US
Chun Chang - Stow OH, US
Leah J. Langsdorf - Akron OH, US
Howard A. Sidaway - Brecksville OH, US
Hiroshi Ito - San Jose CA, US
Assignee:

Promerus LLC - Brecksville OH
International Business Machines Corporation - Armonk NY
International Classification:

G03F 7/004
US Classification:

4302701, 430905, 430907
Abstract:

A photoresist composition encompassing a polymer having at least one polycyclic olefin repeat unit having a desired exo mole percent is provided, where the repeat unit is derived from a polycyclic olefin monomer having the desired exo mole percent. Such polymers having such repeat units having a desired exo mole percent offer control of differential dissolution rate and hence provide enhanced imaging properties. Exemplary monomers having a desired exo mole percent are also provided.

Use Of A Combination Chain Transfer And Activating Agent To Control Molecular Weight And Optical Density Of Pd Catalyzed Norbornene Polymers
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US Patent:

7759439, Jul 20, 2010
Filed:

Mar 27, 2008
Appl. No.:

12/056481
Inventors:

Larry F. Rhodes - Silver Lake OH, US
Steven Smith - Broadview Heights OH, US
Pramod Kandanarachchi - Brecksville OH, US
Chun Chang - Stow OH, US
Patrick Bradley - Kent OH, US
Assignee:

Promerus LLC - Brecksville OH
International Classification:

C08F 32/04
US Classification:

526213, 4302811, 526135, 526145, 526147, 526171, 526172, 526183, 526192, 526242, 526280, 526281, 526291, 5262921, 5262923, 526294, 526308, 526319, 556 23
Abstract:

A method of controlling the molecular weight of poly(cyclic)olefin (norbornene-type) polymers and activating the polymerization thereof with a single material is provided. Such method include adding a chain transfer/activating agent to a mixture of monomer(s), catalyst, solvent and an optional cocatalyst and polymerizing the mixture to form a polymer. It is shown that the amount of chain transfer/activating agent in the mixture can serve to control the molecular weight of the resulting polymer, its percent conversion or both, and in some embodiments the optical density of the resulting polymer.

Norbornene-Type Polymers, Compositions Thereof And Lithographic Process Using Such Compositions
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US Patent:

7799883, Sep 21, 2010
Filed:

Feb 22, 2006
Appl. No.:

11/359880
Inventors:

Larry F. Rhodes - Silver Lake OH, US
Chun Chang - Stow OH, US
Pramod Kandanarachchi - Brecksville OH, US
Lawrence D. Seger - Gates Mills OH, US
Keita Ishiduka - Kawasaki, JP
Kotaro Endo - Kawasaki, JP
Tomoyuki Ando - Kawasaki, JP
Assignee:

Promerus LLC - Brecksville OH
International Classification:

C08F 32/08
G03F 7/11
G03F 7/038
H01L 23/48
US Classification:

526243, 4302731, 4302701, 430326
Abstract:

Embodiments of the present invention relate generally to non-self imageable and imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and the immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming imaging layer and top-coat layers for overlying such imaging layers in immersion lithographic process and the process thereof.

Ni Or Pd-Catalyzed Cationic Polymerization Of Polycyclic Olefins With Silane Chain Transfer Agents
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US Patent:

7863394, Jan 4, 2011
Filed:

Sep 7, 2006
Appl. No.:

11/517538
Inventors:

Larry F. Rhodes - Silver Lake OH, US
Dennis A. Barnes - Medina OH, US
Andrew Bell - Lakewood OH, US
Brian K. Bennett - Brecksville OH, US
Chun Chang - Stow OH, US
John-Henry Lipian - Medina OH, US
Xiaoming Wu - Strongsville OH, US
Assignee:

Promerus LLC - Brecksville OH
International Classification:

C08F 4/70
C08F 10/14
US Classification:

5261691, 4302811, 526 92, 526 93, 526126, 526150, 526166, 526183, 526210, 526212, 526213, 526216, 526242, 526247, 526280, 526281, 526291, 5262929, 526332, 528 9, 528 15, 528401
Abstract:

A method of polymerizing poly(cyclic)olefin monomers encompassing (a) combining a monomer composition containing the poly(cyclic)olefin monomers, a non-olefinic chain transfer agent and an activator compound to form a mixture; (b) heating the mixture; and (c) adding a polymerization catalyst containing Ni and/or Pd. The non-olefinic chain transfer agent includes one or more compounds selected from H, alkylsilanes, alkylalkoxysilanes, alkylgermanes, alkylalkoxygermanes, alkylstannanes, and alkylalkoxystannanes. The activator is characterized as having an active hydrogen with a pKa of at least 5. The resulting poly(cyclic)olefin polymers can be used in photoresist compositions.

Vinyl Addition Polycyclic Olefin Polymers Prepared With Non-Olefinic Chain Transfer Agents And Uses Thereof
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US Patent:

7888415, Feb 15, 2011
Filed:

Feb 4, 2010
Appl. No.:

12/699909
Inventors:

Larry F. Rhodes - Silver Lake OH, US
Dennis A. Barnes - Medina OH, US
Andrew Bell - Lakewood OH, US
Brian K. Bennett - Stansbury Park UT, US
Chun Chang - Carmel IN, US
John Henry Lipian - Medina OH, US
Xiaoming Wu - Lexington KY, US
Assignee:

Promerus LLC - Brecksville OH
International Classification:

C08F 4/44
US Classification:

524171, 526279, 526282, 5263171, 526905
Abstract:

A method of polymerizing poly(cyclic)olefin monomers encompassing (a) combining a monomer composition containing the poly(cyclic)olefin monomers, a non-olefinic chain transfer agent and an activator compound to faun a mixture; (b) heating the mixture; and (c) adding a polymerization catalyst containing Ni and/or Pd. The non-olefinic chain transfer agent includes one or more compounds selected from H, alkylsilanes, alkylalkoxysilanes, alkylgermanes, alkylalkoxygermanes, alkylstannanes, and alkylalkoxystannanes. The activator is characterized as having an active hydrogen with a pKa of at least 5. The resulting poly(cyclic)olefin polymers can be used in photoresist compositions.

Norbornene-Type Polymers, Compositions Thereof And Lithographic Processes Using Such Compositions
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US Patent:

8329838, Dec 11, 2012
Filed:

Sep 17, 2010
Appl. No.:

12/884786
Inventors:

Larry F. Rhodes - Silver Lake OH, US
Chun Chang - Stow OH, US
Pramod Kandanarachchi - Brecksville OH, US
Lawrence D. Seger - Gates Mills OH, US
Keita Ishiduka - Kawasaki, JP
Kotaro Endo - Kawasaki, JP
Tomoyuki Ando - Kawasaki, JP
Assignee:

Promerus LLC - Brecksville OH
International Classification:

G03F 7/039
G03F 7/038
C08F 32/04
US Classification:

526243, 4302701
Abstract:

Embodiments of the present invention relate generally to non-self imagable and imagable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and the immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming imaging layer and top-coat layers for overlying such imaging layers in immersion lithographic process and the process thereof.

Vinyl Addition Polycyclic Olefin Polymers Prepared With Non-Olefinic Chain Transfer Agents And Uses Thereof
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US Patent:

20040229157, Nov 18, 2004
Filed:

Feb 19, 2004
Appl. No.:

10/782547
Inventors:

Larry Rhodes - Silver Lake OH, US
Dennis Barnes - Medina OH, US
Andrew Bell - Lakewood OH, US
Brian Bennet - Brecksville OH, US
Chun Chang - Stow OH, US
John-Henry Lipian - Medina OH, US
Xiaoming Wu - Strongsville OH, US
Assignee:

Promerus LLC
International Classification:

G03C001/76
US Classification:

430/270100
Abstract:

A method of polymerizing poly(cyclic)olefin monomers encompassing (a) combining a monomer composition containing the poly(cyclic)olefin monomers, a non-olefinic chain transfer agent and an activator compound to form a mixture; (b) heating the mixture; and (c) adding a polymerization catalyst containing Ni and/or Pd. The non-olefinic chain transfer agent includes one or more compounds selected from H, alkylsilanes, alkylalkoxysilanes, alkylgermanes, alkylalkoxygermanes, alkylstannanes, and alkylalkoxystannanes. The activator is characterized as having an active hydrogen with a pKa of at least 5. The resulting poly(cyclic)olefin polymers can be used in photoresist compositions.