Thomas N. Horsky - Boxborough MA, US Douglas R. Adams - Pepperell MA, US Dror Oved - Burlington MA, US George Sacco - Topsfield MA, US David J. Hartnett - Tewksbury MA, US
Assignee:
SemEquip, Inc. - North Billerica MA
International Classification:
H01L 21/265 F22B 1/28
US Classification:
438514, 137561 R, 126344, 392386, 257E21334
Abstract:
Vapor delivery systems and methods that control the heating and flow of vapors from solid feed material, especially material that comprises cluster molecules for semiconductor manufacture. The systems and methods safely and effectively conduct the vapor to a point of utilization, especially to an ion source for ion implantation. Ion beam implantation is shown employing ions from the cluster materials. The vapor delivery system includes reactive gas cleaning of the ion source, control systems and protocols, wide dynamic range flow-control systems and vaporizer selections that are efficient and safe. Borane, decarborane, carboranes, carbon clusters and other large molecules are vaporized for ion implantation. Such systems are shown cooperating with novel vaporizers, ion sources, and reactive cleaning systems.
System Having Workstation With Tote Retention And Release Mechanism
- North Billerica MA, US Devin Lert - Wakefield MA, US Stephanie Waite - Burlington MA, US Julian Warhurst - Portsmouth RI, US David Hartnett - Tewksbury MA, US
Assignee:
ALERT INNOVATION INC. - North Billerica MA
International Classification:
B65G 1/06 B65G 1/04 B65G 1/12
Abstract:
An automatic storage and retrieval system is disclosed including storage positions for storing containers, a portal and mobile robots for transferring the containers between the storage positions and portal. The portal may include a bot-access side where the mobile robots transfer containers to and from the portal, and a user-access side where users remove items from the containers.
System Having Workstation With Tote Retention And Release Mechanism
- North Billerica MA, US Devin Lert - Wakefield MA, US Stephanie Waite - Burlington MA, US Julian Warhurst - Portsmouth RI, US David Hartnett - Tewksbury MA, US
Assignee:
ALERT INNOVATION INC. - North Billerica MA
International Classification:
B65G 1/06 B65G 1/12 B65G 1/04
Abstract:
An automatic storage and retrieval system is disclosed including storage positions for storing containers, a portal and mobile robots for transferring the containers between the storage positions and portal. The portal may include a bot-access side where the mobile robots transfer containers to and from the portal, and a user-access side where users remove items from the containers.