David Silva

US Patent:

6341615, Jan 29, 2002

Filed:

Sep 13, 2000

Appl. No.:

09/660633

Inventors:

Robert Sam Zorich - Carlsbad CA
David James Silva - San Diego CA

Assignee:

Air Products and Chemicals, Inc. - Allentown PA

International Classification:

G05D 1620

US Classification:

137 14, 137197, 137341, 13756523

Abstract:

A vacuum purge system is provided to protect the vacuum pump from becoming flooded with liquid that on occasion is purged with vapors from process equipment. The liquid is trapped in a vessel and then evaporated and exhausted through the vacuum pump as vapor. Evaporation of trapped liquid is effected by reducing or stopping the purge stream to the trapping vessel while continuing to operate the vacuum pump, thereby reducing the absolute pressure within the vessel. Evaporation of liquid can also be effected by supplying heat to the trapped vessel, either in cooperation with or instead of the pressure reduction. Use of a programmable logic controller enables a cyclic operation that traps liquid from entering the pump, removes the trapped liquid as vapor, and then resumes normal purge operation.

US Patent:

6431229, Aug 13, 2002

Filed:

Aug 24, 2001

Appl. No.:

09/938883

Inventors:

Charles Michael Birtcher - Valley Center CA
Robert Sam Zorich - Carlsbad CA
Thomas Andrew Steidl - Escondido CA
Gil Vivanco - San Diego CA
Cynthia Lee Trent - Oceanside CA
David James Silva - San Diego CA

Assignee:

Air Products and Chemicals, Inc. - Allentown PA

International Classification:

B65B 104

US Classification:

141302, 141 67, 141100, 137606

Abstract:

A manifold for transfer of chemical, comprising; a heated first conduit for connecting a vessel for containing the chemical to a another vessel, a source of pressurized gas and a source of vacuum; a heated first block valve assembly having first and second diaphragm valves, each valve having a diaphragm and a valve seat side and a diaphragm side, wherein the valve seat side of each valve is juxtaposed to the valve seat side of the other valve, and each valve seat side of each valve communicating with the first conduit; a first connector in the first conduit for detaching the conduit from the vessel; a second conduit, for delivering chemical to the vessel, the second conduit connected to the diaphragm side of the first valve; and a third conduit, for communicating pressurized gas and vacuum to the first conduit, connected to the diaphragm side of the second valve.

US Patent:

6648034, Nov 18, 2003

Filed:

May 23, 2002

Appl. No.:

10/155726

Inventors:

Charles Michael Birtcher - Valley Center CA
Martin Castaneda Martinez - Oceanside CA
Thomas Andrew Steidl - Escondido CA
Gil Vivanco - San Diego CA
David James Silva - San Diego CA

Assignee:

Air Products and Chemicals, Inc. - Allentown PA

International Classification:

F17C 1300

US Classification:

141302, 141 21, 141 47, 141 63, 137209, 137606

Abstract:

A manifold comprising a container having two ports; a conduit connecting the container to a source/dispense of chemical having a first end and a second end and a connector for the ends; first block valve having two diaphragm valves, each valve having a valve seat side and a diaphragm side, each valve seat side faces the other valve seat side, and connected to the first end of the conduit, one diaphragm side connected to a first port, and another diaphragm side connected to vent; a second block valve having two diaphragm valves, having a valve seat side and a diaphragm side, wherein each valve seat side faces the other valve seat side, and each valve seat side connected to the second end of the conduit, the diaphragm side of one valve connected to purge, and the diaphragm side of another valve connected to push gas or chemical outlet.

US Patent:

6953047, Oct 11, 2005

Filed:

Jan 14, 2002

Appl. No.:

10/046614

Inventors:

Charles Michael Birtcher - Valley Center CA, US
Martin Castaneda Martinez - Oceanside CA, US
Thomas Andrew Steidl - Escondido CA, US
Gil Vivanco - San Diego CA, US
David James Silva - San Diego CA, US

Assignee:

Air Products and Chemicals, Inc. - Allentown PA

International Classification:

B08B005/00
B08B009/02
B08B009/032

US Classification:

137240, 134 12, 134 13, 134 2214, 134 2219, 1341022, 134166 C, 134171, 137 1504, 137 1505, 137883, 137885, 251 31, 251 611

Abstract:

The present invention is an apparatus for storing and delivering a low vapor pressure process chemical to a process tool for semiconductor fabrication, comprising: a) a bulk container for storing the process chemical; b) a process container for delivering the process chemical to the process tool; c) a first manifold for delivering process chemical from the bulk container to the process container; d) a solvent container containing a quantity of solvent, and; e) a second manifold for delivering the process chemical from the process container to a process tool. A process for using the apparatus is also contemplated.

US Patent:

7114522, Oct 3, 2006

Filed:

Sep 18, 2004

Appl. No.:

10/944364

Inventors:

David James Silva - San Diego CA, US

International Classification:

F16K 7/17

US Classification:

137597, 251 611

Abstract:

An adapter manifold comprising a first dual valve block having a first diaphragm valve and a second diaphragm valve; a first, a second, and a third low dead space connector for connecting the adapter manifold with dual valve block to the remaining portions of the chemical delivery system; a first conduit for connecting both the diaphragm side of the first diaphragm valve and the seat side of the second diaphragm valves to the first low dead space connector; a second conduit for connecting the seat side of the first diaphragm valve to the second low dead space connector; and a third conduit for connecting the diaphragm side of the second diaphragm valve to the third low dead space connector.

US Patent:

7114531, Oct 3, 2006

Filed:

Aug 2, 2004

Appl. No.:

10/909854

Inventors:

David James Silva - San Diego CA, US

International Classification:

B65B 31/00

US Classification:

141 3, 141 4, 141 47, 141302, 137606

Abstract:

A system for purging high purity interfaces connecting a high purity chemical container to process lines comprises a first purging manifold, connected at one end to a first adapter manifold extending from the high purity chemical container, and connected at the other end either to a process tool, to a second high purity container, to a source of gas, or to a source of vacuum on one side, or to a source of vent or to a source of vacuum on the other side; and a second purging manifold connecting the second adapter manifold either to a source of push gas, a source of purge gas, or a source of vacuum; or to a source of vent. A related method comprises blowing purge gas through both the first and the second purging manifolds, and, optionally, applying vacuum to both purging manifolds.

US Patent:

7198056, Apr 3, 2007

Filed:

Feb 10, 2005

Appl. No.:

11/055225

Inventors:

David James Silva - San Diego CA, US

International Classification:

B67D 5/54

US Classification:

137209, 137240

Abstract:

A high purity chemical delivery system is provided that connects a high purity chemical container to a high purity chemical utilization point and that comprises three manifolds, each of the manifolds having a plurality of diaphragm valves. The inventive system enables rapid clean out and purge after the container is replaced by means of a plurality of vacuum and purge cycles, which remove residual chemical and entrapped impurities while reduced manufacturing downtimes compared with systems in the prior art.

US Patent:

7198072, Apr 3, 2007

Filed:

Jul 13, 2004

Appl. No.:

10/890550

Inventors:

David James Silva - San Diego CA, US

International Classification:

B65B 31/00

US Classification:

141 63, 141 47, 141302, 137606

Abstract:

A purgeable manifold system for the movement of low vapor pressure chemicals that may be embodied in a variety of forms. In one embodiment, a container for storing the low vapor pressure chemical has a plurality of ports; a first manifold detachably connects a first port to a source of gas, vent, or vacuum by flow communication through a first diaphragm valve; a second manifold detachably connects a second port to a source of gas, vent, vacuum, or low vapor pressure chemical, or to a process tool by flow communication through a second and a third diaphragm valve, or alternatively detachably connects a third port to the same source by flow communication through a fourth and the third diaphragm valve; and a third manifold, detachably connects a fourth port to a source of gas, vent, or vacuum by flow communication through a fifth diaphragm valve.