Gregory Calvin Wilson

US Patent:

20170361359, Dec 21, 2017

Filed:

Aug 30, 2017

Appl. No.:

15/690707

Inventors:

- Veldhoven, NL
Chunguang Xia - San Diego CA, US
Gregory James Wilson - San Diego CA, US
Brandon Wilson Verhoff - San Diego CA, US

International Classification:

B08B 5/02
G01F 1/00
G03F 7/20

Abstract:

A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.

US Patent:

20170036252, Feb 9, 2017

Filed:

Nov 11, 2015

Appl. No.:

14/937973

Inventors:

- Veldhoven, NL
Chunguang Xia - San Diego CA, US
Gregory James Wilson - San Diego CA, US
Brandon Wilson Verhoff - San Diego CA, US

International Classification:

B08B 5/02
G01F 1/00

Abstract:

A fluid is directed toward a surface of an optical element based on a first flow pattern, the surface of the optical element including debris and the fluid directed based on the first flow pattern moving at least some of the debris to a first stagnation region at the surface of the optical element; and the fluid is directed toward the optical element based on a second flow pattern, the fluid directed based on the second flow pattern moving at least some of the debris to a second stagnation region on the surface of the optical element, the second stagnation region and the first stagnation region being different locations at the surface of the optical element. Directing the fluid toward the surface of the optical element based on the second flow pattern removes at least some of the debris from the first stagnation region.

US Patent:

20150282287, Oct 1, 2015

Filed:

Jun 16, 2015

Appl. No.:

14/740916

Inventors:

- Veldhoven, NL
Alexander I. Ershov - Escondido CA, US
Brandon Verhoff - San Diego CA, US
Gregory Wilson - San Diego CA, US
Bruno M. La Fontaine - San Diego CA, US

International Classification:

H05G 2/00

Abstract:

A system for an extreme ultraviolet (EUV) light source includes a radical transport system that includes one or more conduits, each of the one or more conduits comprising a sidewall, the sidewall comprising a linear portion and a second portion, the linear portion of the sidewall comprising a first end that defines a first opening, and the second portion of the sidewall comprising one or more openings from an interior of the conduit to an exterior of the conduit, where the second portion of at least one of the one or more conduits is positioned relative to a collector that is inside of a vacuum chamber of the EUV light source with a gap between the collector and the second portion; and a control system.

US Patent:

20150069273, Mar 12, 2015

Filed:

Sep 9, 2013

Appl. No.:

14/022026

Inventors:

- San Diego CA, US
Alexander I. Ershov - Escondido CA, US
Brandon Verhoff - San Diego CA, US
Gregory Wilson - San Diego CA, US
Bruno M. La Fontaine - San Diego CA, US

International Classification:

H05G 2/00

US Classification:

250504 R, 134 11

Abstract:

Free radicals that combine with debris that is created by converting a target mixture to plasma that emits EUV light are received at a first opening defined by a first end of a conduit, the conduit including a material that passes the free radicals and the conduit including a sidewall that extends away from the first opening and defines at least one other opening, the at least one other positioned to release the free radicals toward an element that accumulates the debris on a surface. The free radicals in the conduit are directed toward the at least one other opening. The free radicals are passed through the at least one other opening and to the surface of the element to remove the debris from the surface of the element without removing the element from the EUV light source.