An inspection apparatus includes a laser system. The laser system has a high reflector and an output coupler that define an oscillator cavity which produces an output beam. A gain medium and a mode locking device are positioned in the oscillator cavity. A diode pump source produces a pump beam that is incident on the gain medium. An output beam directing apparatus directs the output beam to the surface of the article. A surface flaw at the surface of the article produces scattered light from at least a portion of the output beam incident on the surface flaw. A detector is positioned to detect the scattered light.
Photonic Crystal Fiber System For Sub-Picosecond Pulses
James D. Kafka - Mountain View CA David E. Spence - Sunnyvale CA
Assignee:
Spectra Physics Lasers, Inc. - Mountain View CA
International Classification:
G02B 626
US Classification:
385 31
Abstract:
Fiber delivery systems are desirable to provide convenient delivery of an output beam from a laser system to a target distanced from the source. For ultra-short pulse lasers, a limiting factor in fiber delivery is the dispersion of the optical fiber. A fiber delivery system for ultra-short pulses that uses a photonic crystal fiber to Fprovide the appropriate dispersion is described.
James D. Kafka - Mountain View CA James B. Clark - Campbell CA Jason D. Henrie - Los Altos CA
Assignee:
Spectra Physics Lasers, Inc. - Mountian View CA
International Classification:
H01S 3098
US Classification:
359333
Abstract:
An amplifier uses a two-dimensional array of cw diodes to produce a pump beam. A coupler is positioned to receive the pump beam. The coupler reduces a cross-sectional dimension of the pump beam and creates a modified pump beam. A vanadate gain medium is positioned adjacent to the coupler. The vanadate gain medium absorbs at least a portion of the modified pump beam and is positioned to receive an input beam from an input beam source and produce an amplified output beam.
Quasi-Continuous Wave Lithography Apparatus And Method
James D. Kafka - Mountain View CA Bruce Craig - Los Gatos CA
Assignee:
Spectra Physics Lasers, Inc. - Mountain View CA
International Classification:
G06F 1900
US Classification:
700121
Abstract:
A lithography system for providing interconnections of integrated circuits on a substrate includes a laser system with a high reflector and an output coupler that define an oscillator cavity. A gain medium and a mode locking device are positioned in the oscillator cavity. A diode pump source produces a pump beam that is incident on the gain medium. A processor is coupled to the laser system and stores a representation of interconnections for the integrated circuit. An output beam directing apparatus is coupled to the processor and directs the output beam to the substrate and form the interconnections.
Emily Cheng - Sunnyvale CA Dave R Dudley - El Granada CA James D. Kafka - Mountain View CA David E. Spence - Sunnyvale CA David S. Bell - San Jose CA
Assignee:
Spectra Physics Lasers, Inc. - Mountain View CA
International Classification:
H01S 314
US Classification:
372 39, 372 75, 372 69
Abstract:
A high power, diode pumped laser has a Nd:YVO gain media. Scaling to higher powers is achieved with the use of a low doped gain media, increasing the length of the gain media as well as increasing the pump volume. Passive cooling is extended to output powers of 10 W or greater.
Method And Apparatus For Micro-Machining Of Articles That Include Polymeric Materials
James D. Kafka - Palo Alto CA Mingwei Li - Sunnyvale CA
Assignee:
Spectra Physics Lasers, Inc. - Mountain View CA
International Classification:
B23K 2638
US Classification:
21912168, 21912169, 264400
Abstract:
A micro-machining apparatus includes a mode-locked, infrared laser system with a high reflector and an output coupler that define an oscillator cavity which produces an output beam. A gain medium and a mode locking device are positioned in the oscillator cavity. A diode pump source produces a pump beam that is incident on the gain medium. A second harmonic generator is coupled to the oscillator cavity. A third harmonic generator is coupled to the second harmonic generator and produces a UV output beam. An output beam directing apparatus directs the output beam to a polymeric surface of an article. At least a portion of the polymeric material is micro-machined by the output beam.
A laser apparatus includes a modelocked laser system with a high reflector and an output coupler that define an oscillator cavity. An output beam is produced from the oscillator cavity. A gain medium and a modelocking device are positioned in the oscillator cavity. A diode pump source produces a pump beam that is incident on the gain medium. A second harmonic generator is coupled to the oscillator cavity. A third harmonic generator that produces a UV output beam, is coupled to the second harmonic generator. A photonic crystal fiber is provided with a proximal end coupled to the laser system. A delivery device is coupled to a distal portion of the photonic crystal fiber.
Method And Apparatus For Polarization And Wavelength Insensitive Pumping Of Solid State Lasers
Dirk Sutter - Mountain View CA, US James D. Kafka - Palo Alto CA, US
Assignee:
Spectra Physics, Inc. - Mountain View CA
International Classification:
H01S003/091
US Classification:
372 70, 372 69, 372 71
Abstract:
An optical system has a diode pump source, and a gain media made of a material with an anisotropic absorption. The gain media is cut at an angle to produce substantially polarization-independent absorption of a pump beam. An optical coupler is positioned between the diode pump source and the gain media. The optical coupler produces a pump beam that has substantially equal amounts of pump power along any two orthogonal axis that are orthogonal to the pump beam in the gain medium. The wavelength range allowed for the pump source is extended.