John M Greene

US Patent:

RE37740, Jun 11, 2002

Filed:

Jan 17, 1995

Appl. No.:

08/373084

Inventors:

Curt H. Chadwick - Los Gatos CA
Robert R. Sholes - Ben Lomond CA
John D. Greene - Santa Cruz CA
Michael E. Fein - Mountain View CA
P. C. Jann - Mountain View CA
David J. Harvey - Campbell CA
William Bell - San Jose CA

Assignee:

KLA-Tencor Corporation - San Jose CA

International Classification:

G01B 1130

US Classification:

356394, 356636, 356446

Abstract:

Substrate inspection apparatus and methods, and illumination apparatus. The inspection apparatus and method includes memory for storing the desired features of the surface of the substrate, focussed illuminator for substantially uniformly illuminating a region of the surface of the substrate to be inspected. Additionally there is a sensor for imaging the region of the substrate illuminated by the illuminator, and a comparator responsive to the memory and sensor for comparing the imaged region of the substrate with the stored desired features of the substrate. The illumination apparatus is designed to provide substantially uniform focussed illumination along a narrow linear region. This apparatus includes first, second and third reflectors elliptically cylindrical in shape, each with its long axis substantially parallel to the long axes of each of the others. Fourth and fifth reflectors are also included with each being flat and mounted parallel to each other and at opposite ends of each of said first, second and third reflectors, and first, second and third linear light sources each mounted parallel to a corresponding one of said first, second and third reflectors with each of the light sources mounted so that it is at the first focus of the corresponding reflector and the illuminated linear region is at the second focus of each of the first, second and third reflectors. The questions raised in reexamination request No.

US Patent:

6833913, Dec 21, 2004

Filed:

Jun 24, 2002

Appl. No.:

10/180807

Inventors:

Ralph C. Wolf - Palo Alto CA
Eva L. Benitez - Sunnyvale CA
Dongsheng Don Chen - Union City CA
John D. Greene - Santa Cruz CA
Jamie M. Sullivan - Sunnyvale CA
Eric N. Vella - Mountain View CA
Khiem D. Vo - Milpitas CA

Assignee:

KLA-Tencor Technologies Corporation - Milpitas CA

International Classification:

G01N 2188

US Classification:

3562372, 250214 AG

Abstract:

Disclosed are methods and apparatus for detecting a relatively wide dynamic range of intensity values from a beam (e. g. , scattered light, reflected light, or secondary electrons) originating from a sample, such as a semiconductor wafer. In other words, the inspection system provides detected output signals having wide dynamic ranges. The detected output signals may then be analyzed to determine whether defects are present on the sample. For example, the intensity values from a target die are compared to the intensity values from a corresponding portion of a reference die, where a significant intensity difference may be defined as a defect. In a specific embodiment, an inspection system for detecting defects on a sample is disclosed. The system includes a beam generator for directing an incident beam towards a sample surface and a detector positioned to detect a detected beam originating from the sample surface in response to the incident beam. The detector has a sensor for detecting the detected beam and generating a detected signal based on the detected beam and a non-linear component coupled to the sensor.

US Patent:

6963295, Nov 8, 2005

Filed:

Jul 2, 2004

Appl. No.:

10/884429

Inventors:

John C. Greene - Allen TX, US
Krishna Doddamane - Dallas TX, US

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

H03M007/12

US Classification:

341 70, 342 42

Abstract:

A method and apparatus for accurately decoding a Manchester data stream having transition time distortion and noise spikes. Briefly, in an embodiment using a protocol where a falling edge at the mid-point of a bit represents a “1” bit and a rising edge at the mid-point represents a “0” bit, the coded data can be accurately determined by comparing the time period tpfrom the start of the bit to the first falling edge and the time period tpfrom the last rising edge to the end point of the bit. If tpis less than tp, the bit represents a bit value of “0” and if tpis less than tp, the bit represents a bit value of “1”.

US Patent:

7012683, Mar 14, 2006

Filed:

Nov 18, 2004

Appl. No.:

10/993473

Inventors:

Ralph C. Wolf - Palo Alto CA, US
Eva L. Benitez - Sunnyvale CA, US
Dongsheng (Don) Chen - Union City CA, US
John D. Greene - Santa Cruz CA, US
Jamie M. Sullivan - Sunnyvale CA, US
Eric N. Vella - Mountain View CA, US
Khiem D. Vo - Milpitas CA, US

Assignee:

KLA-Tencor Technologies Corporation - Milpitas CA

International Classification:

G01N 21/88

US Classification:

3562372

Abstract:

Disclosed are methods and apparatus for detecting a relatively wide dynamic range of intensity values from a beam (e. g. , scattered light, reflected light, or secondary electrons) originating from a sample, such as a semiconductor wafer. In other words, the inspection system provides detected output signals having wide dynamic ranges. The detected output signals may then be analyzed to determine whether defects are present on the sample. For example, the intensity values from a target die are compared to the intensity values from a corresponding portion of a reference die, where a significant intensity difference may be defined as a defect. In a specific embodiment, an inspection system for detecting defects on a sample is disclosed. The system includes a beam generator for directing an incident beam towards a sample surface and a detector positioned to detect a detected beam originating from the sample surface in response to the incident beam. The detector has a sensor for detecting the detected beam and generating a detected signal based on the detected beam and a non-linear component coupled to the sensor.

US Patent:

7253410, Aug 7, 2007

Filed:

Sep 13, 2005

Appl. No.:

11/225917

Inventors:

Kirk J. Bertsche - San Jose CA, US
John Greene - Santa Cruz CA, US

Assignee:

KLA-Tencor Technologies Corporation - Milpitas CA

International Classification:

H01J 37/244

US Classification:

250310, 250396 R, 250397, 250307, 438 18, 438 14, 324751, 324750

Abstract:

One embodiment described relates to a method of electron beam imaging of a target area of a substrate. An electron beam column is configured for charge-control pre-scanning using a primary electron beam. A pre-scan is performed over the target area. The electron beam column is re-configured for imaging using the primary electron beam. An imaging scan is then performed over the target area. Other embodiments are also described.

US Patent:

7346003, Mar 18, 2008

Filed:

Jul 2, 2004

Appl. No.:

10/884428

Inventors:

Krishna Doddamane - Dallas TX, US
John C. Greene - Allen TX, US

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

H04J 15/00

US Classification:

370241, 375340

Abstract:

Circuitry and method for receiving and decoding a data stream without a preamble transmitted from the transmitting device. The invention includes circuitry in the receiver or interrogation unit for generating a simulated preamble signal that is provided to the input of an averaging circuit and a comparator. The averaging circuitry then averages the simulated preamble signal and the actual received data signal to avoid loss of messages and information data at the front end of the received signal from a transponder.

US Patent:

8174363, May 8, 2012

Filed:

Jul 16, 2008

Appl. No.:

12/174238

Inventors:

John Clay Greene - Allen TX, US

Assignee:

Maxim Integrated Products, Inc. - Sunnyvale CA

International Classification:

G08B 21/00

US Classification:

340 101, 340 102, 340 103, 3405721, 342 42, 342 44, 342454

Abstract:

Embodiments of the present invention provide RFID systems having a centralized frequency source and controller. The centralized frequency source generates a reference signal, having a frequency below the RF band of interest, which is transmitted to a plurality of reader nodes. The centralized controller generates and transmits data to the plurality of reader nodes. At each reader node, the reference signal is converted to an RF carrier signal that is modulated and transmitted within corresponding read field of the reader node. This modulated RF carrier signal may interrogate and communicate with one or more RFID tags within this read field. The RF carrier signal may also be held constant to enable communication from RFID tags to the reader node, which is subsequently transmitted back to the centralized controller or processor.

US Patent:

8196732, Jun 12, 2012

Filed:

Aug 2, 2010

Appl. No.:

12/848442

Inventors:

Roumen Iliev Deyanov - Freemont CA, US
Kevin Tzou - San Jose CA, US
Pablo Gonzalez - Oakland CA, US
Robert Carlson - Milpitas CA, US
John Brooks Greene - Pleasanton CA, US

Assignee:

Muratec Automation Co., Ltd. - Kyoto

International Classification:

B65G 49/06
B66B 17/04
H01L 21/677

US Classification:

1983463, 1983462, 41422207, 414281

Abstract:

A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers.