John Thomas Greene

US Patent:

8294125, Oct 23, 2012

Filed:

Dec 9, 2009

Appl. No.:

12/634444

Inventors:

Liqun Han - Pleasanton CA, US
Marian Mankos - Palo Alto CA, US
Xinrong Jiang - Palo Alto CA, US
Rex Runyon - Fremont CA, US
John Greene - Santa Cruz CA, US

Assignee:

KLA-Tencor Corporation - Milpitas CA

International Classification:

H01J 37/20
H01J 37/29
G01N 23/225

US Classification:

25049223, 2504921, 2504922, 25049222, 250397, 250398

Abstract:

One embodiment relates to an electron-beam apparatus for defect inspection and/or review of substrates or for measuring critical dimensions of features on substrates. The apparatus includes an electron gun and an electron column. The electron gun includes an electron source configured to generate electrons for an electron beam and an adjustable beam-limiting aperture which is configured to select and use one aperture size from a range of aperture sizes. Another embodiment relates to providing an electron beam in an apparatus. Advantageously, the disclosed apparatus and methods reduce spot blur while maintaining a high beam current so as to obtain both high sensitivity and high throughput.

US Patent:

8362425, Jan 29, 2013

Filed:

Apr 27, 2011

Appl. No.:

13/095585

Inventors:

Liqun Han - Pleasanton CA, US
Xinrong Jiang - Palo Alto CA, US
John D. Greene - Santa Cruz CA, US

Assignee:

KLA-Tencor Corporation - Milpitas CA

International Classification:

G01N 23/04
G01N 23/00

US Classification:

250307, 250306, 250310

Abstract:

One embodiment disclosed relates to a multiple-beamlet electron beam imaging apparatus for imaging a surface of a target substrate. A beam splitter lens array is configured to split the illumination beam to form a primary beamlet array, and a scanning system is configured to scan the primary beamlet array over an area of the surface of the target substrate. In addition, a detection system configured to detect individual secondary electron beamlets. Another embodiment disclosed relates to a method of imaging a surface of a target substrate using a multiple-beamlet electron beam column. Other features and embodiments are also disclosed.

US Patent:

46717722, Jun 9, 1987

Filed:

Oct 22, 1985

Appl. No.:

6/790297

Inventors:

Michael G. Slade - San Francisco CA
John M. Moscicki - San Francisco CA
John F. Greene - Milford CT

Assignee:

Keilty, Goldsmith & Boone - La Jolla CA

International Classification:

G09B 700

US Classification:

434219

Abstract:

A performance appraisal and training system employs a survey arrangement for procuring performance appraisal data indicative of the performance of a user to be trained, and a data delivery medium for providing computer-readable compiled performance data signals indicative of compiled performance data of the user. Feedback presentation memory components are provided for storing prerecorded feedback display signals indicative of a group of motion picture vignettes illustrative of various situations resulting from various types of performances. A computer responds to the performance data signals and to the display signals for displaying to the user both the compiled performance data and selected corresponding ones of stored motion picture vignettes to illustrate situations resulting from the past performance of the user.