Mark Edward Robson

US Patent:

20130149869, Jun 13, 2013

Filed:

Dec 13, 2011

Appl. No.:

13/324895

Inventors:

Siyi LI - Fremont CA, US
Robert C. HEFTY - Fremont CA, US
Mark Todhunter ROBSON - Danbury CT, US
James R. BOWERS - Brookfield CT, US
Audrey CHARLES - Wappingers Falls NY, US

Assignee:

LAM RESEARCH CORPORATION - Fremont CA

International Classification:

H01L 21/3065

US Classification:

438723, 257E21218

Abstract:

A method etching features through a stack of a silicon nitride layer over a silicon layer over a silicon oxide layer in a plasma processing chamber is provided. The silicon nitride layer is etched in the plasma processing chamber, comprising; flowing a silicon nitride etch gas; forming the silicon nitride etch gas into a plasma to etch the silicon nitride layer, and stopping the flow of the silicon nitride etch gas. The silicon layer is, comprising flowing a silicon etch gas, wherein the silicon etch gas comprises SFor SiF, forming the silicon etch gas into a, and stopping the flow of the silicon etch gas. The silicon oxide layer is etched in the plasma processing chamber, comprising flowing a silicon oxide etch gas, forming the silicon oxide etch gas into a plasma, and stopping the flow of the silicon oxide etch gas.