Robert D Howell

US Patent:

20160315152, Oct 27, 2016

Filed:

Jun 17, 2016

Appl. No.:

15/186193

Inventors:

KAREN M. RENALDO - PASADENA CA, US
ERIC J. STEWART - SILVER SPRING MD, US
ROBERT S. HOWELL - SILVER SPRING MD, US
HOWELL GEORGE HENRY - ELLICOTT CITY MD, US
HARLAN CARL CRAMER - COLUMBIA MD, US
JUSTIN ANDREW PARKE - ELLICOTT CITY MD, US
MATTHEW RUSSELL KING - LINTHICUM MD, US

Assignee:

NORTHROP GRUMMAN SYSTEMS CORPORATION - FALLS CHURCH VA

International Classification:

H01L 29/15
H01L 29/06
H01L 29/66
H01L 29/205
H01L 29/417
H01L 21/3065
H01L 21/768
H01L 29/778
H01L 29/20

Abstract:

An integrated circuit is disclosed that includes a single channel device having a first portion of a single shared heterostructure overlying a substrate structure in a single channel device area, and a gate contact that is in contact with the first portion of the single shared heterostructure. The integrated circuit also includes a multichannel device comprising a second portion of the single shared heterostructure overlying the substrate structure in a multichannel device area, a barrier layer overlying the second portion of the single shared heterorstructure, and a superlattice structure overlying the barrier layer, the superlattice structure comprising a plurality of heterostructures. An isolation region in the single shared heterostructure electrical isolates the single channel device from the multichannel device.