Samir Afif

US Patent:

6340327, Jan 22, 2002

Filed:

Oct 15, 1999

Appl. No.:

09/419259

Inventors:

Samir A. Afif - Alburtis PA

Assignee:

Agere Systems Guardian Corp. - Orlando FL

International Classification:

B24B 2118

US Classification:

451444, 451287

Abstract:

An apparatus and method for polishing a workpiece including a polishing pad; at least one polishing arm for holding a workpiece to be polished on the polishing pad; at least one conditioning arm for conditioning the polishing pad; and, a slurry dispenser. The slurry dispenser is disposed between the at least one polishing arm and the at least one conditioning arm so that slurry dispensed by the slurry dispenser contacts the at least one conditioning pad before it contacts the at least one polishing pad.

US Patent:

62509918, Jun 26, 2001

Filed:

Oct 15, 1999

Appl. No.:

9/419453

Inventors:

Samir A. Afif - Alburtis PA

Assignee:

Agere Systems Guardian Corp. - Orlando FL

International Classification:

B24B 100

US Classification:

451 41

Abstract:

An apparatus and method for polishing a workpiece including a polishing pad, and at least one polishing arm for holding a workpiece to be polished on the polishing pad. The polishing arm includes at least one plastic bearing. The plastic bearing prevents lock up of a vacuum chuck coupled to the polishing arm because it is impervious to slurry which often becomes lodged in conventional ball bearings.