Steven R Stringer

US Patent:

57016453, Dec 30, 1997

Filed:

Jun 2, 1995

Appl. No.:

8/460772

Inventors:

Donald Eugene Allen - Gilbert AZ
Steven Ray Stringer - Mesa AZ
Richard Dale Coyne - late of Gilbert AZ

Assignee:

Motorola, Inc. - Schaumburg IL

International Classification:

H03H 308
G01R 3100

US Classification:

29 2535

Abstract:

A method for making an acoustic wave device. The method has steps of providing a substrate suitable for acoustic wave devices and processing the substrate to provide a patterned metallization thereon. The patterned metallization includes an acoustic wave filter pattern. The method also has steps of measuring a sheet resistance associated with the acoustic wave filter pattern, determining a resistance of a test pattern associated with the acoustic wave filter pattern to provide a measured resistance and computing an estimated average linewidth for the acoustic wave filter pattern from the measured resistance and the sheet resistance.

US Patent:

57715564, Jun 30, 1998

Filed:

Nov 7, 1995

Appl. No.:

8/554469

Inventors:

Donald Eugene Allen - Gilbert AZ
Steven Ray Stringer - Mesa AZ
Richard Dale Coyne - Mesa AZ

Assignee:

Motorola Inc. - Schaumburg IL

International Classification:

H03H 308
G01R 3100

US Classification:

29 2535

Abstract:

A method for making an acoustic wave device. The method has steps of providing a substrate suitable for acoustic wave devices and processing the substrate to provide a patterned metallization thereon. The patterned metallization includes an acoustic wave filter pattern. The method also has steps of measuring a sheet resistance associated with the acoustic wave filter pattern, determining a resistance of a test pattern associated with the acoustic wave filter pattern to provide a measured resistance and computing an estimated average linewidth for the acoustic wave filter pattern from the measured resistance and the sheet resistance.