Mark S. Hammond - Houston TX Timothy W. McClain - Houston TX
Assignee:
SI Diamond Technology, Inc. - Austin TX
International Classification:
H05H 124
US Classification:
427576
Abstract:
Apparatus and method are provided for forming coatings of transition metal compounds on solid bodies using cathodic arcs and a reactive gas in a vacuum chamber. The metal composition of the coatings is varied by moving the articles to be coated through the vacuum chamber having cathodes at selected locations, the articles being supported on movable supports.