Michael McSwiney - Hillsboro OR, US Timothy McWilliams - Portland OR, US
International Classification:
C23C016/00 B05D003/00
US Classification:
1187230MA, 427248100, 427561000
Abstract:
Numerous embodiments of a method and apparatus for low temperature silicon nitride deposition are disclosed. In one embodiment, a halogen substituted silicon hydride and a nitrogen-containing precursor are added to a chamber. An operating temperature of the chamber is set below 550 C. and a silicon nitride layer is deposited on a substrate.
Intel Corporation
Oregon Regulatory Manager and Product Ecology Strategist
Intel Corporation May 2013 - Feb 2018
Product Ecology Engineer
Intel Corporation May 2009 - May 2013
Integration Engineer
Intel Corporation May 2005 - May 2009
Quality and Reliability Engineer
Intel Corporation Apr 2000 - May 2005
Equipment Development Engineer
Education:
Stanford University 1998 - 2000
Master of Science, Masters, Materials Science, Engineering
Penn State University 1992 - 1998
Bachelors, Bachelor of Arts, Bachelor of Science, Physics, Philosophy
Brooklyn Park Elementary School Baltimore MD 1976-1977, Maiden Choice Elementary School Baltimore MD 1977-1981, Halethorpe Elementary School Halethorpe MD 1981-1982, Arbutus Middle School Arbutus MD 1982-1985
Blair Oaks High School Jefferson City MO 1992-1996
Community:
Lindsey Dusenberry, John Boessen, Jennifer Luebbert, Jodi Huff, Lyne Smith, Sarah Hoelscher, Nathan Barnett, Aubrey Meller, April Weider, Josh Adams, Anthony Schulte