Toan C Tran

US Patent:

20180226230, Aug 9, 2018

Filed:

Feb 3, 2017

Appl. No.:

15/424488

Inventors:

- Santa Clara CA, US
Hideo Sugai - Kasugai-shi, JP
Nikolai Kalnin - Belmont CA, US
Soonam Park - Sunnyvale CA, US
Toan Tran - San Jose CA, US
Dmitry Lubomirsky - Cupertino CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

H01J 37/32
H01L 21/67

Abstract:

A system includes a process chamber, a housing that defines a waveguide cavity, and a first conductive plate within the housing. The first conductive plate faces the process chamber. The system also includes one or more adjustment devices that can adjust at least a position of the first conductive plate, and a second conductive plate, coupled with the housing, between the waveguide cavity and the process chamber. Electromagnetic radiation can propagate from the waveguide cavity into the process chamber through apertures in the second conductive plate. The system also includes a dielectric plate that seals off the process chamber from the waveguide cavity, and one or more electronics sets that transmit the electromagnetic radiation into the waveguide cavity. A plasma forms when at least one process gas is within the chamber, and the electromagnetic radiation propagates into the process chamber from the waveguide cavity.

US Patent:

20150304297, Oct 22, 2015

Filed:

Apr 29, 2015

Appl. No.:

14/699762

Inventors:

- Chantilly VA, US
Ryan B. Johnson - San Francisco CA, US
Toan Tran - Bristow VA, US
David Reed - Stone Ridge VA, US
Abhilash Ravindran - Sterling VA, US
George K. Tsantes - Great Falls VA, US

Assignee:

INTERSECTIONS, INC. - Chantilly VA

International Classification:

H04L 29/06
G06Q 20/36
G06Q 40/02

Abstract:

A system for secure information storage and delivery includes a vault repository that includes a secure vault associated with a user, wherein the secure vault is associated with a service level including at least one of a data type or a data size limit associated with the secure vault, the secure vault being adapted to receive and at least one data entry and securely store the at least one data entry if the at least one of a size or a type of the at least one data entry is consistent with the service level. A mobile vault server coupled to the vault repository creates a mobile vault on a mobile device based on the secure vault and is capable of authenticating the mobile device based on user authentication information. The mobile vault server includes a mobile device handler that communicates with the mobile device. A synchronization utility determines whether the at least one data entry on the secure vault is transferable to or storable on the mobile vault based on at least one of the size or the type of the at least one data entry and transfers the at least one data entry from the secure vault to a corresponding data entry on the mobile vault if the at least one data entry on the secure vault is determined to be transferable to or storable on the mobile vault.

US Patent:

20150013793, Jan 15, 2015

Filed:

Sep 9, 2014

Appl. No.:

14/481774

Inventors:

- Santa Clara CA, US
Qiwei LIANG - Fremont CA, US
Hanh D. NGUYEN - San Jose CA, US
Xinglong CHEN - San Jose CA, US
Matthew MILLER - Newark CA, US
Soonam PARK - Sunnyvale CA, US
Toan Q. TRAN - San Jose CA, US
Adib KHAN - Santa Clara CA, US
Dmitry LUBOMIRSKY - Cupertino CA, US
Shankar VENKATARAMAN - Santa Clara CA, US

International Classification:

C23C 16/455

US Classification:

137561 A

Abstract:

Apparatus and methods for gas distribution assemblies are provided. In one aspect, a gas distribution assembly is provided comprising an annular body comprising an annular ring having an inner annular wall, an outer wall, an upper surface, and a bottom surface, an upper recess formed into the upper surface, and a seat formed into the inner annular wall, an upper plate positioned in the upper recess, comprising a disk-shaped body having a plurality of first apertures formed therethrough, and a bottom plate positioned on the seat, comprising a disk-shaped body having a plurality of second apertures formed therethrough which align with the first apertures, and a plurality of third apertures formed between the second apertures and through the bottom plate, the bottom plate sealingly coupled to the upper plate to fluidly isolate the plurality of first and second apertures from the plurality of third apertures.