Baoguo G Zhang

US Patent:

20130095640, Apr 18, 2013

Filed:

Apr 4, 2012

Appl. No.:

13/439677

Inventors:

Baoguo Zhang - San Jose CA, US

Assignee:

Lux Material Co., Ltd. - Jiangyin

International Classification:

H01L 31/0236
H01L 21/36

US Classification:

438478, 428167

Abstract:

Substrates for electronic device fabrication and methods thereof. A reusable substrate with at least a plurality of grooves for electronic device fabrication includes a substrate body made of one or more substrate materials and including a top planar surface, the top planar surface being divided into a plurality of planer regions by the plurality of grooves, the plurality of grooves including a plurality of bottom planar surfaces. Each of the plurality of grooves includes a bottom planar surface and two side surfaces, the bottom planar surface being selected from the plurality of bottom planar surfaces, the two side surfaces being in contact with the top surface and the bottom surface. The bottom planar surface is associated with a groove width from one of the two side surfaces to the other of the two side surfaces, the groove width ranging from 0.1 μm to 5 mm.