Alex Viet Tran

US Patent:

6413793, Jul 2, 2002

Filed:

May 17, 2001

Appl. No.:

09/858469

Inventors:

Chuang-Chia Lin - San Pablo CA
Peter M. Gulvin - Webster NY
Alex T. Tran - Madison NJ
Nena Liakopoulos - Long Beach NY

Assignee:

Xerox Corporation - Stamford CT

International Classification:

H01L 2100

US Classification:

438 50, 438 52, 257415, 257417, 257622

Abstract:

A semiconductor structure includes a substrate, a sacrificial layer formed on or over the substrate, and a structural layer formed on or over the sacrificial layer. At least one opening is formed in the structural layer. At least one opening is formed in the sacrificial layer below the at least one opening in the structural layer. The at least one opening in the structural layer and the at least one opening in the sacrificial layer are at least partially filled with a filler material. At least one portion of the structural layer is removed to define at least one microstructure. The sacrificial layer is removed such that the at least one microstructure is released from the substrate and the filler material forms one or more protrusions on the at least one microstructure, and/or one or more anchors anchoring the at least one microstructure to the substrate.

US Patent:

20200093560, Mar 26, 2020

Filed:

Dec 13, 2017

Appl. No.:

16/468804

Inventors:

- Dakland CA, US
Jun ZHANG - La Jolla CA, US
Alex TRAN - La Jolla CA, US
Winnie KUANG - La Jolla CA, US

International Classification:

A61B 90/00
A61B 34/30
A61B 34/00
G01P 15/18
G01L 1/00
G01L 5/16

Abstract:

Systems and methods according to present principles provide for three axis force sensing in a convenient and manufacturable way. In one implementation, a vibrating motor is attached at the fixed end of an anisotropic structure, such as a rod, which then vibrates in a circular motion. A monitor such as a 3-axis accelerometer is also attached to the anisotropic structure. The resulting motion is then mapped electronically for analysis. With no force applied, a circular motion is achieved. When a net force is applied to the free, vibrating end of the rod, the circular pattern which is traced out becomes distorted, e.g., progressively flattened into an ellipse, in a repeatable way which is directly proportional to the applied force. The axis of the applied force can be ascertained according to the direction in which the ellipse forms. Systems and methods according to present principles may be used in any application in which force sensing is needed, e.g., robotics, including robotic surgery.