Allan Wilfred Adams

US Patent:

20050154567, Jul 14, 2005

Filed:

Aug 24, 2004

Appl. No.:

10/924759

Inventors:

Rebecca Jackman - Boston MA, US
Scott Brittain - Morrisville NC, US
Olivier Schueller - Arlington MA, US
Allan Adams - Menlo Park CA, US
Hongkai Wu - Palo Alto CA, US
Sue Hays Whitesides - Montreal, CA
George Whitesides - Newton MA, US
Mara Prentiss - Belmont MA, US

Assignee:

President and Fellows of Harvard College - Cambridge MA

International Classification:

G06F007/60
G06F017/10
H01L021/76

US Classification:

703002000

Abstract:

The present invention relates to three-dimensional microstructures and methods for making these microstructures, particularly microstructures having integral features less than about 1 mm. Examples of these microstructures include trusses. The microstructures can be prepared from two-dimensional structures having a deformable portion. Thus, by applying a deformation along these deformable portions, e.g. bending, a third-dimension can be created. The deformable portions can comprise thinner dimensions than more rigid portions to allow facile deformation to a predetermined angle or orientation. Electroplating at least a portion of the three-dimensional microstructure with a metal coating allows the formation of integral features in addition to covering any defects formed by the deformation and/or strengthening any thin components. The initial two-dimensional microstructure can be prepared by various patterning methods such as soft lithographic methods.