An H Le

US Patent:

62831437, Sep 4, 2001

Filed:

Mar 31, 2000

Appl. No.:

9/540152

Inventors:

Richard S. Adachi - Fremont CA
An Le - San Jose CA

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

F16K 4900

US Classification:

137341

Abstract:

The present invention discloses a gas delivery apparatus for control of process and purge gases is disclosed that is suitable for use in a semiconductor processing system. The gas delivery apparatus includes a base plate integrating a printed circuit board and a heating layer. In addition, the gas delivery apparatus includes a plurality of gas stick components mounted on the base plate. Specific gas components are coupled to the integrated printed circuit board, which provides an electrical interface to the control electronics.

US Patent:

20150271033, Sep 24, 2015

Filed:

Mar 20, 2014

Appl. No.:

14/220300

Inventors:

- Basking Ridge NJ, US
Kalyan PAMARTHY - San Francisco CA, US
Santanu DAS - Sunnyvale CA, US
Yunzhu CHEN - Mountain View CA, US
An LE - San Mateo CA, US
Xuepeng SUN - Wellesley MA, US

Assignee:

Verizon Patent and Licensing Inc. - Basking Ridge NJ

International Classification:

H04L 12/26

Abstract:

A device receives information associated with machine-to-machine (M2M) devices connected to a host server device via a network. The information associated with the M2M devices include one or more of device information associated with components of the M2M devices, application information generated by the M2M devices, or network information associated with interactions of the M2M devices, with the network, when the M2M devices provide the application information to the host server device via the network. The device performs an analysis of the information associated with the M2M devices via one or more analytics techniques, and generates analysis information based on the analysis of the information associated with the M2M devices. The device provides the analysis information for display by the host server device.