A stage for processing a substrate, especially useful for vacuum applications, has a recess just large enough to hold a substantially flat substrate and a chuck or holder but not much more. The perimeter of the recessed side has an air bearing surface separated from the recess by differentially pumped groves and seal lands. The air bearing lands are urged against a reference plate guide surface and the seal lands being substantially coplanar create a resistance to flow between the groves and recess, on the other side of the base reference plate mounts the radiation source. The VCS may operate in a vacuum environment itself, or in another preferred embodiment, it provides the possibility for multiple stages moving between process or inspection steps within the same tool or process sequence.
Vacuum Chamber Stage With Application Of Vacuum From Below
A stage for processing a substrate, especially useful for vacuum applications, has a recess just large enough to hold a substantially flat substrate and a chuck or holder, but not much more. The perimeter of both top and bottom of the stage has air bearing surfaces separated from the recess by differentially pumped grooves and seal lands. The air bearing lands are guided between two reference surfaces and the seal lands, being substantially coplanar, create a resistance to flow between the bearings and the recess. On the other side of one of the reference plates mounts the radiation source or process. The opposite reference plate may have a large aperture, non-contact pumping port. This improves vacuum capability and stage precision. The stage may operate in a vacuum environment itself or can provide multiple stages moving between processes or inspection steps within the same tool or process sequence.
Non-Contact Porous Air Bearing And Glass Flattening Device
Thin substrates, such as flat glass panels, are levitated on a porous media air bearing creating a pressurized film of air and preloaded against the air film by negative pressure areas. The pressure can be distributed most uniformly across the pressure areas by defusing the pressure through a porous medium. Such a bearing can be used for glass flattening by holding the glass such that the unevenness is migrated to the side opposite the side to be worked on.
Method And Apparatus For In-Line Processing And Immediately Sequential Or Simultaneous Processing Of Flat And Flexible Substrates Through Viscous Shear In Thin Cross Section Gaps For The Manufacture Of Micro-Electronic Circuits Or Displays
A method and apparatus for cleaning, drying, coating, baking etching and deposition of surfaces on glass substrate as it transitions thru and between small gaps between hydro-static porous media bearings. Due to the non-contact nature of the device extremely high pressures can be induced upon the work piece through various fluids without damage to the substrate, allowing the system to utilize the viscous nature of fluids to accomplish the desired cleaning, drying, coating, etching or baking. The process also allows for simultaneous and immediately sequential ordering of processes.
Gearless Vertical Axis Wind Turbine With Bearing Support And Power Generation At Perimeter
A vertical axis wind turbine (VAWT) includes air or water bearing supports. The VAWT may be configured to float. The VAWT may include a 360 rotor, having a precision machined noncorrosive bearing surface at its perimeter, with a system of wind capturing devices configured to collect kinetic energy of wind. The rotor may be supported by at least three air or water bearing supports positioned substantially at a perimeter of the rotor. Electrical generation components may be located substantially at the perimeter of the rotor.
Hydrostatic Bearing Made Of Magnetic Material Which Is Also Used As A Motor Magnet
A permanent magnet motor is provided with a housing, a rotating shaft supported within the housing, and magnetic coils arranged within the housing. A hydrostatic bearing is disposed on the rotating shaft, the hydrostatic bearing having a permanent magnet incorporated therewith that restricts movement of the rotating shaft in a radial direction.
Method And A Device For Depositing A Film Of Material Or Otherwise Processing Or Inspecting, A Substrate As It Passes Through A Vacuum Environment Guided By A Plurality Of Opposing And Balanced Air Bearing Lands And Sealed By Differentially Pumped Groves And Sealing Lands In A Non-Contact Manner
A method and apparatus for coating and baking and deposition of surfaces on glass substrate or flexible substrate, such as films and thin glass sheets or other similar work pieces as it transitions thru and between small gaps of aero-static or hydro-static porous media bearings and differentially pumped vacuum grooves, in a non-contact manner, in order to process within a vacuum environment. The process is also intended to incorporate simultaneous and immediately sequential ordering of various processes.
Method And Apparatus For In-Line Processing And Immediately Sequential Or Simultaneous Processing Of Flat And Flexible Substrates Through Viscous Shear In Thin Cross Section Gaps For The Manufacture Of Micro-Electronic Circuits Or Displays
A method and apparatus for cleaning, drying, coating, baking etching and deposition of surfaces on glass substrate as it transitions thru and between small gaps between hydro-static porous media bearings. Due to the non-contact nature of the device extremely high pressures can be induced upon the work piece through various fluids without damage to the substrate, allowing the system to utilize the viscous nature of fluids to accomplish the desired cleaning, drying, coating, etching or baking. The process also allows for simultaneous and immediately sequential ordering of processes.
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