Anil A Mavanur

US Patent:

20030107013, Jun 12, 2003

Filed:

Dec 11, 2002

Appl. No.:

10/316284

Inventors:

Alfred Pappo - Melrose MA, US
Mary Parent - Waltham MA, US
Andrew Sumberg - Newton MA, US
Anil Mavanur - Woburn MA, US

International Classification:

F16K031/02

US Classification:

251/011000, 251/129060, 251/129010, 251/129140

Abstract:

A variable valve with an actuator that elongates upon application of an electrically-derived field. The valve includes an actuator comprising an actuator member made of a material that is elongated by an electrically-derived field. A coil surrounding the actuator member selectively applies an electrically-derived field to the actuator member. The valve further comprises a fluid flow path, an opening in the fluid flow path defining a flow area, and a closure member movable by the actuator member from a closed or more closed position in which it is restricting some or all of the flow area, to an open or more open position in which it is restricting less of the flow area, to selectively alter the fluid flow rate through the opening.

US Patent:

20030168295, Sep 11, 2003

Filed:

Feb 12, 2003

Appl. No.:

10/365696

Inventors:

Zhixiu Han - Acton MA, US
Anil Mavanur - Worcester MA, US
Chandrashekhar Joshi - Bedford MA, US

International Classification:

F16F009/53
F16M011/00

US Classification:

188/267100, 267/136000

Abstract:

A vibration isolation system, with an actuator having two nested, relatively movable members defining an interior portion, and a magnetostrictive member coupled to both nested members and within the interior portion. A variable-strength magnetic field is applied to the magnetostrictive member, for controlling the elongation of the magnetostrictive member, to thereby control the relative positions of the two nested members.

US Patent:

20050260951, Nov 24, 2005

Filed:

May 19, 2004

Appl. No.:

10/848667

Inventors:

Chandrashekhar Joshi - Bedford MA, US
Anil Mavanur - Woburn MA, US
Chiu-Ying Tai - Chelmsford MA, US

International Classification:

H04B001/40
H04B001/04

US Classification:

455077000, 455120000, 455340000

Abstract:

Tunable RF cavity. The cavity includes a magnetostrictive material coupled to the cavity and a magnetic coil configured to impress a magnetic field on the magnetostrictive material. Control circuitry energizes the magnetic coil to control the shape of the magnetostrictive material, thereby to control the length of the cavity to tune its resonant frequency.

US Patent:

20050283230, Dec 22, 2005

Filed:

Jun 16, 2005

Appl. No.:

11/153976

Inventors:

Chandrashekhar Joshi - Bedford MA, US
Chiu-Ying Tai - Chelmsford MA, US
Anil Mavanur - North Andover MA, US

International Classification:

A61F002/06

US Classification:

623001440

Abstract:

Heat switch. The switch includes a magnetostrictive member and a coil arranged to apply a magnetic field to the magnetostrictive member to cause the member to change from a first state to a second state of elongation. A heat conductive flexible structure is coupled to the magnetostrictive member so as to change its lateral extent in response to a change from the first state of elongation to the second state of elongation of the magnetostrictive member. A heat conductive housing is adjacent to at least one surface of the flexible structure so that the at least one surface of the flexible structure is in contact with the housing in one state of elongation of the magnetostrictive member and out of contact with the housing in the other state of elongation of the magnetostrictive member. The switch controls the flow of heat from a relatively warmer surface to a relatively colder surface.

US Patent:

20070096600, May 3, 2007

Filed:

Nov 1, 2005

Appl. No.:

11/264643

Inventors:

Anil Mavanur - Littleton MA, US
Jordan Cormier - Westminster MA, US

International Classification:

H01L 41/08

US Classification:

310328000, 310317000

Abstract:

Hybrid actuator. The actuator includes a piezoelectric actuator spaced apart from a magnetostrictive actuator. A linkage is in contact with the piezoelectric and magnetostrictive actuator, the linkage having an end including microgrooves. A rotatable shaft includes microgrooves mating with the microgrooves in the linkage end. Electronic circuitry is provided to drive the piezoelectric actuator and the magnetostrictive actuator resulting in the piezoelectric and the magnetostrictive actuators moving 180 out of phase thereby moving the linkage to rotate the shaft. It is preferred that the actuators be driven at resonance. In one embodiment, the actuator includes three actuators to provide motion about three axes. In another embodiment the actuator is a linear actuator.

US Patent:

20090137192, May 28, 2009

Filed:

Nov 28, 2007

Appl. No.:

11/946388

Inventors:

Hossein Zarrin - Winchester MA, US
Gordon Hill - Arlington MA, US
Anil Mavanur - Littleton MA, US

Assignee:

MKS Instruments, Inc. - Wilmington MA

International Classification:

B24B 7/00

US Classification:

451 66, 60420, 137625

Abstract:

A pressure control system that controls the pressure of a fluid in a plurality of zones includes a distribution manifold, at least one main manifold connected to the distribution manifold, and at least one disposable manifold connected to the distribution manifold and the main manifold. The disposable manifold is adapted to be replaced independent of the distribution manifold and the main manifold, and is connected to each zone and to at least one vacuum source. The distribution manifold distributes the fluid to the plurality of zones, so as to cause flow of the fluid into and out of a measurement chamber located within each zone. The main manifold includes, for each zone, a pressure sensor configured to measure pressure in the measurement chamber in that zone, and a control valve configured to regulate the flow of the fluid through that zone.