Anthony T Bassaro

US Patent:

51801507, Jan 19, 1993

Filed:

Jan 24, 1992

Appl. No.:

7/825520

Inventors:

Joseph P. Prusak - Huntington CT
Anthony Bassaro - Bethel CT

Assignee:

Hughes Danbury Optical Systems, Inc. - Danbury CT

International Classification:

B25B 120

US Classification:

269254R

Abstract:

An apparatus (10) for providing a consistent registration of a semiconductor wafer undergoing process work includes a platen (38) upon which a surround (14) is registered. The surround registers to the platen (38) by matching two pins (42), (40) that protrude from the platen (38) to a hole (44) and a notch (46) in the surround (14), respectively. A first registration surface (16) for registering a flat (20) of a semiconductor wafer (12) is permanently mounted to the surround (14). A second registration surface (18) for registering a point (24) on the circumference of the semiconductor wafer (12) is permanently mounted to the surround (14). A third, adjustable registration surface (26) also registers to a point (28) on the circumference of the wafer (12). This third registration surface (26) is springloaded to accommodate for slight diameter variations in successively processed semiconductor wafers, and to provide a force to hold the wafer (12) in place.