Anthony Edward Bell

US Patent:

46706852, Jun 2, 1987

Filed:

Apr 14, 1986

Appl. No.:

6/851755

Inventors:

William M. Clark - Thousand Oaks CA
Mark W. Utlaut - Saugus CA
Joseph A. Wysocki - Oxnard CA
Edmund K. Storms - Los Alamos NM
Eugene G. Szklarz - Los Alamos NM
Robert G. Behrens - Los Alamos NM
Lynwood W. Swanson - McMinnville OR
Anthony E. Bell - McMinnville OR

Assignee:

Hughes Aircraft Company - Los Angeles CA

International Classification:

H01J 105
H01J 2726

US Classification:

313230

Abstract:

A liquid metal ion source and alloy for the simultaneous ion evaporation of arsenic and boron, arsenic and phosphorus, or arsenic, boron and phosphorus. The ionic species to be evaporated are contained in palladium-arsenic-boron and palladium-arsenic-boron-phosphorus alloys. The ion source, including an emitter means such as a needle emitter and a source means such as U-shaped heater element, is preferably constructed of rhenium and tungsten, both of which are readily fabricated. The ion sources emit continuous beams of ions having sufficiently high currents of the desired species to be useful in ion implantation of semiconductor wafers for preparing integrated circuit devices. The sources are stable in operation, experience little corrosion during operation, and have long operating lifetimes.

US Patent:

58718486, Feb 16, 1999

Filed:

Oct 6, 1997

Appl. No.:

8/944364

Inventors:

Michael J. Bozack - Opelika AL
Lynwood W. Swanson - Portland OR
Anthony E. Bell - McMinnville OR
William M. Clark Jr. - Thousand Oaks CA
Mark W. Utlaut - Saugus CA
Edmund K. Storms - Los Alamos NM

Assignee:

Oregon Graduate Institute of Science & Technology - Portland OR

International Classification:

B32B 900

US Classification:

428408

Abstract:

A binary, boron-based alloy as a source for field-emission-type, ion-beam generating devices, wherein boron predominates in the alloy, preferably with a presence of about 60 atomic percent. The other constituent in the alloy is selected from the group of elements consisting of nickel, palladium and platinum. Predominance of boron in these alloys, during operation, promotes combining of boron with trace impurities of carbon in the alloys to form B. sub. 4 C and thus to promote wetting of an associated carbon support substrate.

US Patent:

47556838, Jul 5, 1988

Filed:

Oct 5, 1987

Appl. No.:

7/104410

Inventors:

Anthony E. Bell - McMinnville OR
Lynwood W. Swanson - Portland OR

Assignee:

Oregon Graduate Center - Beaverton OR

International Classification:

H01J 2702

US Classification:

250423R

Abstract:

A corrosion-resistant, long-life, high-capacity, power-efficient source substructure for a source of liquid-metal ions useable in focused-ion-beam apparatus. The substructure takes the form of an elongate carbon needle, pointed at one end, structurally supported entirely within the turns of an electrical heating coil having end leads which are conductively connected to, and structurally supported by, a pair of larger cross section electrical feeder legs.