Dongmei Li - Boulder CO, US J. William Medlin - Boulder CO, US Anthony H. McDaniel - Livermore CA, US Robert J. Bastasz - Livermore CA, US
Assignee:
The Regents of the University of Colorado - Boulder CO The United States of America as represented by The United States Department of Energy - Washington DC
International Classification:
G01N 7/00
US Classification:
73 232
Abstract:
The invention provides hydrogen selective metal-insulator-semiconductor sensors which include a layer of hydrogen selective material. The hydrogen selective material can be polyimide layer having a thickness between 200 and 800 nm. Suitable polyimide materials include reaction products of benzophenone tetracarboxylic dianhydride 4,4-oxydianiline m-phenylene diamine and other structurally similar materials.
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