Anthony J Simpson

US Patent:

6758339, Jul 6, 2004

Filed:

Jul 11, 2002

Appl. No.:

10/194981

Inventors:

Anthony Simpson - Savage MN
Brian Wiseman - Glencoe MN

Assignee:

Entegris, Inc. - Chaska MN

International Classification:

B65D 8530

US Classification:

206710, 206711, 206454, 206832

Abstract:

A wafer carrier for carrying a plurality of axially aligned thin circular wafers. The wafer carrier has a framework portion formed from a pair of end members connected by a plurality of side support members. A pair of opposing sidewall assemblies is positioned between the pair of end members, and is attached to at least one side support member. Each sidewall assembly has a plurality of shelves defining a plurality of slots for receiving a wafer. The sidewall assemblies are formed from a plurality of stacked together individual shelf members. Each shelf member has a body portion with an upper surface and a lower surface. The lower surface has a plurality of pegs which are positioned to be received by a plurality of apertures formed in the upper surface of an immediately adjacent individual shelf member.

US Patent:

7400383, Jul 15, 2008

Filed:

Apr 3, 2006

Appl. No.:

11/396949

Inventors:

David L. Halbmaier - Shorewood MN, US
Anthony Simpson - Savage MN, US
William M. Goodwin - Medway MA, US
Oleg P. Kishkovich - Greenville RI, US
Thomas B. Kielbaso - Colorado Springs CO, US
Frank Manganiello - Maplewood MI, US

Assignee:

Entegris, Inc. - Chaska MN

International Classification:

G03B 27/58

US Classification:

355 72, 355 75, 206449, 206454, 2504921, 2504922, 378 34, 55318

Abstract:

The present invention provides a standardized mechanical interface (SMIF) reticle pod that is configured to provide a controlled environment for supporting a reticle wherein the controlled environment is maintained substantially free of crystal growth causing contaminants. Accordingly, there is provided a layered filter with filter elements capable of filtering particulates and adsorbing gaseous contaminants. The filter has an inwardly facing face generally planar shaped with a surface area that is substantially half or more of the area of the reticle face. The inwardly facing face is placed in close proximity to the reticle patterned surface and has an area that is a significant fraction of the reticle patterned surface area. The SMIF pod is also provided with a purge system configured to inject a very dry gas within the controlled environment to flush the controlled environment of contaminants as well as to regenerate the filter.

US Patent:

20160368835, Dec 22, 2016

Filed:

Jun 15, 2016

Appl. No.:

15/182864

Inventors:

- Houston TX, US
Peter Tanev TANEV - Katy TX, US
Shaojun MIAO - Katy TX, US
Anthony Tyler SIMPSON - Katy TX, US
Daniel Edward GERWIEN - Sugar Land TX, US

International Classification:

C07C 2/76
B01J 29/48

Abstract:

Implementations of the disclosed subject matter provide a process for the aromatization of a methane-containing gas stream that includes contacting the methane-containing gas stream in a reaction zone of an aromatization reactor comprising an aromatization catalyst and a titanium hydrogen acceptor under methane-containing gas aromatization conditions to produce a product stream comprising aromatics and hydrogen, wherein at least a portion of the produced hydrogen is bound by the titanium hydrogen acceptor in the reaction zone and removed from the product and the reaction zone as titanium hydride, and wherein the weight ratio of titanium hydrogen acceptor to the aromatization catalyst is at least 1:1.

US Patent:

20160368836, Dec 22, 2016

Filed:

Jun 15, 2016

Appl. No.:

15/182954

Inventors:

- Houston TX, US
Daniel Edward GERWIEN - Sugar Land TX, US
Shaojun MIAO - Katy TX, US
Anthony Tyler SIMPSON - Katy TX, US
Elizabeth Colquhoun HOWLAND - Houston TX, US
Steven Sangyun LIM - Kingwood TX, US

International Classification:

C07C 2/76
B01J 29/90
B01J 38/10
B01J 29/48

Abstract:

Implementations of the disclosed subject matter provide a process for the aromatization of a methane-containing gas stream that includes contacting the methane-containing gas stream in a reaction zone of an aromatization reactor comprising an aromatization catalyst and a zirconium hydrogen acceptor under methane-containing gas aromatization conditions to produce a product stream comprising aromatics and hydrogen, wherein at least a portion of the produced hydrogen is bound by the zirconium hydrogen acceptor in the reaction zone and removed from the product and the reaction zone as zirconium hydride, and wherein the weight ratio of zirconium hydrogen acceptor to the aromatization catalyst is at least 1:1.