Toshiyuki Nagata - Plano TX, US Hiroyuki Yoshida - Plano TX, US Masayuki Moroi - Richardson TX, US Atsushi Satoh - Dallas TX, US
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
H01L027/108 H01L029/76 H01L029/94 H01L031/119
US Classification:
257306, 257296
Abstract:
In a DRAM array using a capacitor-under-bitline (CUB) layout, the plate layer of the capacitor is significantly reduced in area to reduce misalignments in connections between the bitline and the underlying transistors.
Reduced Size Plate Layer Improves Misalignments In Cub Dram
Toshiyuki Nagata - Plano TX, US Hiroyuki Yoshida - Plano TX, US Masayuki Moroi - Richardson TX, US Atsushi Satoh - Dallas TX, US
International Classification:
H01B013/00
US Classification:
365202000
Abstract:
In a DRAM array using a capacitor-under-bitline (CUB) layout, the plate layer of the capacitor is significantly reduced in area to reduce misalignments in connections between the bitline and the underlying transistors.