Timothy A. Brunner - Ridgefield CT Michael S. Hibbs - Westford VT Barbara B. Peck - Westford VT Chrisopher A. Spence - Westford VT
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
G01N 2186
US Classification:
250548
Abstract:
A photolithography mask structure having a novel optical focus test pattern is described. The mask structure has a non-phase-shifted, transparent substrate and includes a phase shifter of other than 180. degree. disposed between spaced, parallel opposing lines such that an alternating pattern of non-phase-shifted material and phase-shifted material is defined transverse said parallel lines. When projected onto the surface of an object measurable shifts of the test pattern corresponds in direction and magnitude with the extent of system defocus. Various alternating test pattern embodiments are presented, all of which include at least one phase shift window of other than 180. degree. in relation to the mask substrate. Further, a monitoring system and a monitoring process are discussed employing the presented mask structures.
Action Greensboro
Public Art Consultant
Pace Communications Sep 1999 - Sep 2001
Freelance Art Director
Clarkson N Potter Publishers 1989 - 1997
Freelance Graphic Design and Project Management
House and Garden Magazine 1989 - 1989
Freelance Art Director
Random House 1989 - 1989
Interim Managing Editor
Education:
Sweet Briar College
Skills:
Editing Strategic Planning Nonprofits Public Relations Photography Editorial Event Management
"The chaos and uncertainty of the pandemic may slow sales of other products, but I do not anticipate that this will impact Apple in the long run," said Barbara Peck, an analyst at Nucleus Research.
Peck uses humor to deal with what has to be a deeply emotional issue for him. Born in Manhattan to an unwed mother, Barbara Peck, he has never laid eyes on his father. So his dad didn't step forth even now that Peck is enjoying some degree of fame? "Not that I know of. Have you heard anything?" Peck