Benjamin C Yu

US Patent:

6954121, Oct 11, 2005

Filed:

Jun 9, 2003

Appl. No.:

10/457737

Inventors:

Paul D. Bradley - Mountain View CA, US
Yury Oshmyansky - Camarillo CA, US
Benjamin Yu - Sunnyvale CA, US

Assignee:

Agilent Technologies, Inc. - Palo Alto CA

International Classification:

H03H009/00

US Classification:

333187, 333133

Abstract:

An apparatus such as a thin film resonator has a bottom electrode, a top electrode, and a composite layer between the two electrodes. The composite layer includes a piezoelectric (PZ) layer having a first coupling coefficient and a coupling coefficient control (CCC) layer having a second coupling coefficient. By varying the relative thicknesses of the PZ layer and the CCC layer during the manufacturing process, the coupling coefficient of the resonator can be established (to any value between the first coupling coefficient and the second coupling coefficient) with minimal impact on resonant frequency. Further, it is relatively less difficult to fabricate the PZ layer and the CCC layer having the desired coupling coefficient (as a combination of the first coupling coefficient and the second coupling coefficient) compared to the difficulties of fabrication of a uniform PZ layer having the desired coupling coefficient.

US Patent:

6787080, Sep 7, 2004

Filed:

Jul 19, 2002

Appl. No.:

10/111953

Inventors:

Frederick F. Lange - Santa Barbara CA 93111
Benjamin C. Yu - Sunnyvale CA 94087

International Classification:

B28B 126

US Classification:

264 86, 264621, 264651, 264667

Abstract:

Colloidal isopressing provides a rapid method to form an engineering shape from a powder slurry, previously filtered to remove strength degrading inclusions. A slurry composed of a weakly attractive particle network, produced with a short-range, repulsive interparticle par potential, is consolidated to make a body with a high particle density that is easily fluidized by vibration. The fluid-like body is injected into a flexible mold and subjected to a larger isostatic pressure to force particles into contact. This creates a strong, elastic body with the shape of the mold. Because the particles are forced into contact at a high pressure, the liquid remaining within the component can be removed by evaporation without shrinkage, avoiding fracture during rapid drying.