Brian C Ahr

US Patent:

20210136903, May 6, 2021

Filed:

Jan 11, 2021

Appl. No.:

17/146280

Inventors:

- Milpitas CA, US
Brian Ahr - San Jose CA, US
Rudy F. Garcia - Union City CA, US
Frank Chilese - San Ramon CA, US
Oleg Khodykin - San Diego CA, US

Assignee:

KLA CORPORATION - Milpitas CA

International Classification:

H05G 2/00

Abstract:

The present disclosure is directed to laser produced plasma light sources having a target material, such as xenon, that is coated on the outer surface of a drum. Bearing systems rotate the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.

US Patent:

20190075641, Mar 7, 2019

Filed:

Jul 9, 2018

Appl. No.:

16/030693

Inventors:

- Milpitas CA, US
Brian Ahr - San Jose CA, US
Rudy F. Garcia - Union City CA, US
Frank Chilese - San Ramon CA, US
Oleg Khodykin - San Diego CA, US

International Classification:

H05G 2/00

Abstract:

The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a drum. Embodiments include bearing systems for rotating the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.

US Patent:

20170142817, May 18, 2017

Filed:

Sep 14, 2016

Appl. No.:

15/265515

Inventors:

- Milpitas CA, US
Brian Ahr - San Jose CA, US
Rudy F. Garcia - Union City CA, US
Frank Chilese - San Ramon CA, US
Oleg Khodykin - San Diego CA, US

International Classification:

H05G 2/00

Abstract:

The present disclosure is directed to laser produced plasma light sources having a target material, such as Xenon, that is coated on the outer surface of a drum. Embodiments include bearing systems for rotating the drum that have structures for reducing leakage of contaminant material and/or bearing gas into the LPP chamber. Injection systems are disclosed for coating and replenishing target material on the drum. Wiper systems are disclosed for preparing the target material surface on the drum, e.g. smoothing the target material surface. Systems for cooling and maintaining the temperature of the drum and a housing overlying the drum are also disclosed.