Mark C. Reuter - Montrose NY, US Brian A. Bryce - Ithaca NY, US Bojan R. Ilic - Ithaca NY, US Sandip Tiwari - Ithaca NY, US
Assignee:
International Business Machines Corporation - Armonk NY Cornell University - Ithaca NY
International Classification:
G01Q 60/38 H01L 21/306 B82Y 40/00
US Classification:
850 32, 850 33, 850 40, 850 45, 850 60, 850 29
Abstract:
A method of creating a probe for scanned probe microscopy is disclosed. The method includes providing a wafer having a support wafer layer and a device layer. The method includes masking the wafer with a masking layer. The method includes removing a portion of the masking layer at the device layer. The method includes etching the wafer along the portion of the masking layer that has been removed to create a crystal facet surface that is oriented at a tilt angle. The method includes epitaxially growing a tip along the crystal facet surface.
Scanned Probe Microscopy (Spm) Probe Having Angled Tip
Mark C. Reuter - Montrose NY, US Brian A. Bryce - Ithaca NY, US Bojan R. Ilic - Ithaca NY, US Sandip Tiwari - Ithaca NY, US
Assignee:
CORNELL UNIVERSITY - Ithaca NY INTERNATIONAL BUSINESS MACHINES CORPORATION - Armonk NY
International Classification:
G01Q 70/08 G01Q 60/38
US Classification:
850 40, 850 56
Abstract:
A probe for scanned probe microscopy is provided. The probe includes a cantilever beam and a tip. The cantilever beam extends along a generally horizontal axis. The cantilever beam has a crystal facet surface that is oriented at a tilt angle with respect to the generally horizontal axis. The tip projects outwardly from the crystal facet surface.
The Johns Hopkins University Applied Physics Laboratory
Senior Professional Staff
Harvey Mudd College Jul 1, 2015 - Jan 2018
Assistant Professor of Engineering
National Institute of Standards and Technology Mar 2014 - Jul 2015
National Research Council Postdoctoral Fellow
Ibm Dec 2012 - Dec 2013
Post-Doctoral Researcher
Cornell University Apr 2007 - Nov 2012
Graduate Researcher
Education:
Cornell University 2006 - 2012
Doctorates, Doctor of Philosophy, Applied Physics, Philosophy
University of Maryland 2001 - 2005
Bachelors, Bachelor of Science, Physics, Electronics Engineering