An improved wafer holder design is described which has manufacturing and performance advantages over present state-of-the-art holders used in various wafer processing applications. The new wafer holder design incorporates a series of short radial grooves. The grooves extend from the base of a circular channel, which runs along the outside diameter of the substrate wafer recess, to a fixed radial location which varies based on wafer size and thickness. The grooves provide a slight overlap with the wafer to facilitate the free exchange of gases beneath the wafer necessary for wafer loading and unloading operations. The short length of the radial grooves make the wafer holder easier to manufacture and offer more robust performance compared to the present state-of-the-art holders.
Robert Bertin - San Jose CA Michael B. Miller - DeSota TX Burl M. Moon - Richardson TX Robert C. Post - Dallas TX
Assignee:
Air Products and Chemicals, Inc. - Allentown PA
International Classification:
C04B 3556
US Classification:
264 81
Abstract:
A capillary for use in ball bonding tools designed to bond metal leads to the bonding pads on a microchip and pads or leads on a chip support is formed by chemically vapor depositing a substantially smooth silicon carbide coating having high electrical resistivity onto a substrate which is then removed by etching or combustion.
Barrel Structure For Semiconductor Epitaxial Reactor
Robert C. Post - Dallas TX Kevin N. Bordelon - Dallas TX Burl M. Moon - Richardson TX
Assignee:
Air Products and Chemicals, Inc. - Allentown PA
International Classification:
C23C 1600
US Classification:
118730
Abstract:
A multipiece susceptor assembly that includes a generally flat polyhedron shaped top and bottom defining a plurality of facets on which panels are secured for supporting wafers to be processed. Various embodiments are disclosed including a top plate that receives a slide. The polyhedron shape portion further includes a multifaced side which includes an open side face that receives a single face mounted on the slide. A bottom plate is provided that fits within the bottom frame. The single side face structure to mount on the slide and the bottom frame prevents displacement of the slide and holds the slide against the frame during rotation of the susceptor. In another embodiment each individual panel is secured to the top plate by a hanger on the panel inserted in a cavity on the top plate while the panel is secured to the bottom plate in a locking relation by a notch in the panel interfitting with a triangular tab extending outward from the bottom plate. A back draft on the tab secures the panel against outward movement. The individual panels are likewise joined together by a tongue and groove interfitting such that when assembled the panels collectively form on enclosure that protects the interior against entry of gases and light from the surrounding process environment.
Robert Bertin - San Jose CA Michael B. Miller - DeSota TX Burl M. Moon - Richardson TX Robert C. Post - Dallas TX
Assignee:
Air Products and Chemicals, Inc. - Allentown PA
International Classification:
B23K 100 B23K 300
US Classification:
428 36
Abstract:
A capillary for use in ball bonding tools designed to bond metal leads to the bonding pads on a microchip and pads or leads on a chip support is formed by chemically vapor depositing a substantially smooth silicon carbide coating having high electrical resistivity onto a substrate which is then removed by etching or combustion.