Clifford A. King - Union County NJ Byung G. Park - Scotch Plains NJ
Assignee:
AT&T Bell Laboratories - Murray Hill NJ
International Classification:
H01L 2120
US Classification:
437131
Abstract:
A method is described for making at least one MOS transistor on a silicon substrate. According to this method, a layer of a silicon dioxide material is formed on a principal surface of the substrate. The oxide layer is then patterned such that at least one source region and at least one drain region of the substrate are exposed. A layer of boron-doped germanium is then deposited on the exposed regions by RTCVD. The substrate is then heated such that boron diffuses from the germanium layer into the source and drain regions. The substrate principal surface can then be etched such that the germanium layer is removed with high selectivity.
Dr. Park graduated from the Chonnam Univ Med Sch, Kwangju, So Korea in 1971. He works in Racine, WI and specializes in Neurology. Dr. Park is affiliated with Wheaton Franciscan Healthcare All Saints.
Pathway Medical Group 12665 Gdn Grv Blvd STE 502A, Garden Grove, CA 92843 (714)5377800 (phone), (714)5377633 (fax)
Languages:
English Spanish
Description:
Ms. Park works in Garden Grove, CA and specializes in Family Medicine. Ms. Park is affiliated with Fountain Valley Regional Hospital & Medical Center, Garden Grove Hospital Medical Center, Huntington Beach Hospital and Kindred Hospital Of Santa Ana.