Charles Chiou

US Patent:

39582558, May 18, 1976

Filed:

Dec 31, 1974

Appl. No.:

5/537795

Inventors:

Charles Chiou - San Jose CA
Guido Galli - Saratoga CA
Karl H. Loeffler - San Jose CA
Max R. Lorenz - Saratoga CA

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G01D 1518

US Classification:

346140R

Abstract:

A nozzle array structure for pressurized fluid jets includes a uniform deposited membrane having an array of uniform small orifices therein overlaying a planar substrate having an array of larger aperture openings therethrough with approximately the same central axes as the orifice array. The method of making includes forming a substrate of a planar single crystal material oriented with the (100) planes parallel to the surface. A membrane comprising a uniform coating of an inorganic material is applied to the planar surface of the substrate. The substrate is preferentially etched from the rear surface to form an array of openings therein extending therethrough to the membrane. The membrane is then selectively eroded to form an array of uniform small orifices therein.

US Patent:

41069765, Aug 15, 1978

Filed:

Nov 9, 1977

Appl. No.:

5/849920

Inventors:

Charles Chiou - San Jose CA
Guido Galli - Saratoga CA
Karl H. Loeffler - San Jose CA
Max R. Lorenz - Saratoga CA

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G01D 1518
H01L 21306

US Classification:

156644

Abstract:

A nozzle array structure for pressurized fluid jets includes a uniform deposited membrane having an array of uniform small orifices therein overlaying a planar substrate having an array of larger aperture openings therethrough with approximately the same central axes as the orifice array. The method of making includes forming a substrate of a planar single crystal material oriented with the (100) planes parallel to the surface. A membrane comprising a uniform coating of an inorganic material is applied to the planar surface of the substrate. The substrate is preferentially etched from the rear surface to form an array of openings therein extending therethrough to the membrane. The membrane is then selectively eroded to form an array of uniform small orifices therein.