Christopher R Sanders

US Patent:

8624469, Jan 7, 2014

Filed:

Apr 22, 2011

Appl. No.:

13/643649

Inventors:

David Dausch - Raleigh NC, US
Jim Carlson - Durham NC, US
Christopher Brewer Sanders - Wake Forest NC, US
Scott H. Goodwin - Chapel Hill NC, US

Assignee:

Research Triangle Institute - Research Triangle Park NC

International Classification:

H01L 41/08
A61B 8/00

US Classification:

310334, 600437, 600459

Abstract:

A method and associated apparatus directed to a piezoelectric micromachined ultrasonic transducer (pMUT) defining an air-backed cavity are provided. A first via defined by a device substrate and associated dielectric layer, and extending to the first electrode, is substantially filled with a first conductive material. A support member engaged with the device substrate defines a second via extending to the first conductive material. The second via has a second conductive material disposed thereon, forms an electrically-conductive engagement with the first conductive material, and extends outwardly of the second via to be accessible externally to the support member. A connective element extends through a third via defined by a connection support substrate and is in electrically-conductive engagement with the second conductive material, wherein one of the connective element and connection support substrate is bonded to one of the support member and second conductive material by a bonding material engaged therebetween.