1341 Stockton St, San Francisco, CA 94133 729 California Dr, Burlingame, CA 94010
Chun H. Lin Cardiovascular
The Washington University College/University · Rheumatology Department · University/School of Medicine · Mfg Surgical/Medical Instruments College/University · Noncommercial Research Organization Medical Laboratory · Health/Allied Services College/University · Medical Doctor's Office College/University · Dept of Internal Mediciine
Medical School Northwestern University Feinberg School of Medicine Graduated: 2002
Procedures:
Physical Therapy Neurological Testing
Languages:
English Spanish
Description:
Dr. Lin graduated from the Northwestern University Feinberg School of Medicine in 2002. He works in Dallas, TX and specializes in Pain Management and Physical Medicine & Rehabilitation. Dr. Lin is affiliated with Baylor Medical Center At Uptown, Baylor Scott & White Medical Center Waxahachie and Methodist Dallas Medical Center.
Medical School University of Virginia School of Medicine Graduated: 2004
Languages:
English
Description:
Dr. Lin graduated from the University of Virginia School of Medicine in 2004. He works in Houston, TX and specializes in Cardiovascular Disease and Internal Medicine. Dr. Lin is affiliated with Houston Methodist Hospital and Houston Methodist Willowbrook Hospital.
Dan Meisburger - San Jose CA Alan D. Brodie - Palo Alto CA Curt Chadwick - Los Gatos CA Anil Desai - San Jose CA Hans Dohse - Pleasanton CA Dennis Emge - San Jose CA John Greene - Los Altos CA Ralph Johnson - Los Gatos CA John McMurtry - Menlo Park CA Barry Becker - San Jose CA Ray Paul - Palo Alto CA Mike Robinson - San Jose CA Richard Simmons - Los Altos CA David E. A. Smith - San Mateo CA John Taylor - San Jose CA Lee Veneklasen - Castro Valley CA Dean Walters - Napierville IL Paul Wieczorek - San Jose CA Sam Wong - San Jose CA April Dutta - Milpitas CA Surendra Lele - Santa Clara CA Kirkwood Rough - San Jose CA Henry Pearce-Percy - Los Gatos CA Jack Y. Jau - Fremont CA Chun C. Lin - Cupertino CA Hoi T. Nguyen - Milpitas CA Yen-Jen Oyang - Cupertino CA Timothy L. Hutcheson - Los Gatos CA David J. Clark - Atherton CA Chung-Shih Pan - Palo Alto CA Chetana Bhaskar - San Jose CA Chris Kirk - Beconsfield Bucks, GB2 Eric Munro - London, GB2
Assignee:
KLA Instruments Corporation - San Jose CA
International Classification:
H01J 3726
US Classification:
250310
Abstract:
There is disclosed numerous embodiments of a method and apparatus for a particle scanning system and an automatic inspection system. In each of these a particle beam is directed at the surface of a substrate for scanning that substrate. Also included are a selection of detectors to detect at least one of the secondary particles, back-scattered particles and transmitted particles from the substrate. The substrate is mounted on an x-y stage to provide it with at least one degree of freedom while the substrate is being scanned by the/particle beam. The substrate is also subjected to an electric field on it's surface to accelerate the secondary particles. The system also has the capability to accurately measure the position of the substrate with respect to the charged particle beam. Additionally, there is an optical alignment means for initially aligning the substrate beneath the,particle beam means. To function most efficiently there is also a vacuum means for evacuating and repressurizing a chamber containing the substrate.