Cindy L Chen

US Patent:

6955177, Oct 18, 2005

Filed:

Dec 7, 2001

Appl. No.:

10/011497

Inventors:

Eddie Chiu - Pleasanton CA, US
Cindy Wailam Chen - San Jose CA, US
Wesley Phillip Graff - Austin TX, US

Assignee:

Novellus Systems, Inc. - San Jose CA

International Classification:

B08B007/00
B08B007/04

US Classification:

134 12, 134 11, 134 26

Abstract:

The present invention pertains to methods for cleaning semiconductor wafers, more specifically, for removing polymeric and other residues from a wafer using dry plasmas generated with microwave (MW), electromagnetic field (inductively-coupled plasma (ICP)), and radio frequency (RF) energy. First, a wafer is treated by applying a microwave-generated plasma or an inductively-coupled plasma. Second, a radio frequency generated plasma is applied. Each of the microwave-generated plasma and the inductively-coupled plasma is produced from a gas mixture, which includes an oxygen source gas, a fluorine source gas, and a hydrogen source gas. Using such plasmas provides more controllable etch rates than conventional plasmas via control of fluorine concentration in the plasma. Application of a radio frequency generated (preferably oxygen-based) plasma is used for additional photoresist and polymer removal. The use of this two-step approach provides superior wafer cleaning compared to conventional wet and dry clean methods.

US Patent:

20140136433, May 15, 2014

Filed:

Nov 15, 2012

Appl. No.:

13/678236

Inventors:

Christian Posse - Forster City CA, US
Andrew P. Hill - San Francisco CA, US
Anmol Bhasin - Mountain View CA, US
Cindy Yao Chen - Sunnyvale CA, US
Sachit Kamat - San Mateo CA, US

International Classification:

G06Q 99/00

US Classification:

705319

Abstract:

Systems and methods for referring members of a social network as job candidates are described. In some examples, the systems and methods receive information associated with a job or a company associated with a job, identify members of a social network based on attributes for the members, and perform an action (e.g., send an email or update a widget on a profile page) associated with a member of the social network that is connected to the identified members and affiliated with the company.

US Patent:

20140136434, May 15, 2014

Filed:

Nov 15, 2012

Appl. No.:

13/678271

Inventors:

Christian Posse - Forster City CA, US
Andrew P. Hill - San Francisco CA, US
Anmol Bhasin - Mountain View CA, US
Cindy Yao Chen - Sunnyvale CA, US
Sachit Kamat - San Mateo CA, US

International Classification:

G06Q 10/06

US Classification:

705319

Abstract:

Systems and methods for referring members of a social network as job candidates are described. In some examples, the systems and methods receive information associated with a job or a company associated with a job, identify members of a social network based on attributes for the members, and perform an action (e.g., send an email or update a widget on a profile page) associated with a member of the social network that is connected to the identified members and affiliated with the company.