Chanmin Su - Ventura CA, US Nghi Phan - Santa Barbara CA, US Craig Prater - Santa Barbara CA, US
Assignee:
Veeco Instruments, Inc. - Woodbury NY
International Classification:
G01B 5/28 G01N 13/16
US Classification:
73105
Abstract:
A cantilever probe-based instrument is controlled to counteract the lateral loads imposed on the probe as a result of probe sample interaction. The probe preferably includes an active cantilever, such as a so-called bimorph cantilever. Force counteraction is preferably achieved by monitoring a lateral force-dependent property of probe operation such as cantilever free end deflection angle and applying a voltage to at least one of the cantilever and one or more separate actuators under feedback to maintain that property constant as the probe-sample spacing decreases. The probe could further uses at least one of contact flexural and torsional resonances characteristics to determine contact and release points. With the knowledge of the tip profile, quantitative mechanical data for probe sample interaction can be obtained.
Method And Apparatus For Obtaining Material Property Information Of A Heterogeneous Sample Using Harmonic Resonance Imaging
Chanmin Su - Ventura CA, US Craig Prater - Goleta CA, US Gregory F. Meyers - Midland MI, US Bryant R. LaFreniere - Midland MI, US
Assignee:
The Dow Chemical Company - Midland MI Veeco Instruments Inc. - Plainview NY
International Classification:
G01B 5/28
US Classification:
73105
Abstract:
A method and apparatus for its practice are provided of differentiating at least one component of a heterogeneous sample from other component(s) using harmonic resonance imaging and of obtaining information regarding the sample from the differentiation. In a preferred embodiment, an image is created of a property of a harmonic or a combination of a harmonics producing a response having a contrast factor between the sample's constituent components. The desired harmonic(s) can be identified either in a preliminary data acquisition procedure on the sample or, if the sample's constituent components are known in advance, predetermined. The desired harnonic(s) may be identified directly by the user or automatically through, e. g. , pattern recognition. A compositional map may then be generated and displayed and/or additional information about the sample may be obtained.
Thermal Mechanical Drive Actuator, Thermal Probe And Method Of Thermally Driving A Probe
Chanmin Su - Ventura CA, US Robert C. Daniels - Goleta CA, US Craig Prater - Santa Barbara CA, US
Assignee:
Veeco Instruments Inc. - Plainview NY
International Classification:
G01B 5/28 G01Q 60/58
US Classification:
73105, 850 50
Abstract:
A drive actuator for a measurement instrument having a probe, the drive actuator including a heating element in a thermally conductive relationship with the probe such that application of electric current to the heating element modifies a characteristic of the probe. The probe device includes a probe including a cantilever having a lever made of a material having a selected thermal expansivity and a drive actuator in operable cooperation with the cantilever lever made of a material having a thermal expansivity different than the thermal expansivity of the material of which the cantilever lever is made.
Craig Prater - Goleta CA, US Chanmin Su - Ventura CA, US Nghi Phan - Santa Barbara CA, US Jeffrey M. Markakis - Santa Barbara CA, US Craig Cusworth - Redding CA, US Jian Shi - Goleta CA, US Johannes H. Kindt - Santa Barbara CA, US Steven F. Nagle - Santa Barbara CA, US Wenjun Fan - Oxnard CA, US
A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe of the SPM and a sample to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.
Scanning Stylus Atomic Force Microscope With Cantilever Tracking And Optical Access
Craig B. Prater - Santa Barbara CA, US James Massie - Santa Barbara CA, US David A. Grigg - Santa Barbara CA, US Virgil B. Elings - Santa Barbara CA, US Paul K. Hansma - Santa Barbara CA, US Barney Drake - Santa Barbara CA, US
Assignee:
Bruker Nano, Inc. - Santa Barbara CA
International Classification:
G01B 5/28 G01Q 60/24
US Classification:
73105, 850 6, 850 33
Abstract:
A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides light emitted from the light source onto a point on a cantilever during scanning thereof. A moving light beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the light beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.
Method And Apparatus For Obtaining Quantitative Measurements Using A Probe Based Instrument
Chanmin Su - Ventura CA, US Nghi Phan - Santa Barbara CA, US Craig Prater - Santa Barbara CA, US
Assignee:
Bruker Nano, Inc. - Santa Barbara CA
International Classification:
G01B 5/28 G01Q 90/00
US Classification:
73105, 850 33, 850 62, 850 63
Abstract:
A method includes determining the point at which a tip of a probe based instrument contacts a sample and/or the area of that contact by dynamically oscillating a cantilever of the instrument in flexural and/or torsional modes. The method additionally includes using oscillation characteristics, such as amplitude, phase, and resonant frequency, to determine the status of the contact and to provide quantitative data. Static and quasi-static measurements, including contact stiffness and elastic modulus, can be obtained from the thus obtained data. Quasistatic measurements, such as creep and viscoelastic modulus, can be obtained by repeating the static measurements for a number of force profiles at different force application rates and correlating the resultant data using known theories.
Fast-Scanning Spm Scanner And Method Of Operating Same
Nghi Phan - Santa Barbara CA, US Craig Cusworth - Redding CA, US Craig Prater - Santa Barbara CA, US
Assignee:
Bruker Nano, Inc. - Santa Barbara CA
International Classification:
G01Q 10/00 G01Q 20/02 G01Q 60/24
US Classification:
850 1, 850 6, 850 33
Abstract:
A high-bandwidth SPM tip scanner is provided that additionally includes an objective that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics also are preferably provided to permit targeting of the sensing light beam on the SPM's probe and to permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe under direct visual inspection of focused illumination beam of an optical microscope integrated into the SPM and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. A high-bandwidth tip scanner constructed in this fashion has a fundamental resonant frequency greater than greater than 500 Hz and a sensing light beam spot minor diameter of less than 10 μm. Images can be scanned on large samples having a largest dimension exceeding 7 mm with a resolution of less than 1 Angstrom and while scanning at rates exceeding 30 Hz.
Kevin Kjoller - Santa Barbara CA, US Khoren Sahagian - Burbank CA, US Doug Gotthard - Carpinteria CA, US Anthony Kurtz - Sanat Barbara CA, US Craig Prater - Santa Barbara CA, US Roshan Shetty - Westlake Village CA, US Michael Reading - Norwich, GB
Assignee:
Anasys Instruments - Santa Barbara CA
International Classification:
G01N 25/00 G01K 3/00 G01K 7/00
US Classification:
374 16, 374137, 374164, 374166, 374167
Abstract:
A system and method for automatic analysis of temperature transition data over an area of a sample surface. The system relies on the use of a microfabricated probe, which can be rapidly heated and cooled and has a sharp tip to provide high spatial resolution. The system also has fast x-y-z positioners, data collection, and algorithms that allow automatic analysis of and visualization of temperature transition data.
Photothermal Spectroscopy Corp
Chief Technology Officer
Anasys Instruments Dec 2007 - Apr 2018
Chief Technology Officer
Dos Pueblos Engineering Academy 2014 - 2015
Engineering Mentor
Veeco Metrology Group 1998 - 2007
Veeco Fellow
Veeco Instruments 1992 - 2007
Chief Technologist and Veeco Fellow
Education:
Uc Santa Barbara 1987 - 1992
Doctorates, Doctor of Philosophy, Physics
Texas A&M University 1983 - 1987
Bachelors, Bachelor of Science, Physics
Coronado High School 1983
Skills:
Nanotechnology Afm Characterization Mems Materials Science Optics R&D Metrology Nanomaterials Thin Films Spectroscopy Physics Nanofabrication Semiconductors Sensors Photonics Microfabrication Research and Development Microscopy Nanoparticles Labview Experimentation Materials Optoelectronics Scanning Probe Microscopy Semiconductor Industry Design of Experiments
Craig Prater (1966-1970), Stephen Hoffman (1966-1966), Bill Hall (1968-1972), Mark Davis (1992-1996), Robert Seers (1959-1963), Karl Karl Sykes (1983-1987)