Craig E Stauffer

US Patent:

56980370, Dec 16, 1997

Filed:

Jul 2, 1993

Appl. No.:

8/086970

Inventors:

Craig M. Stauffer - Santa Clara CA

International Classification:

C23C 1600

US Classification:

118726

Abstract:

An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.

US Patent:

57077835, Jan 13, 1998

Filed:

Dec 4, 1995

Appl. No.:

8/566666

Inventors:

Craig M. Stauffer - Sunnyvale CA
William R. Peterson - Phoenix AZ

Assignee:

Complex Fluid Systems, Inc. - Santa Clara CA

International Classification:

G03C 556
G03C 160

US Classification:

430313

Abstract:

Top surface imaging by silylation of organic photoresists for use in lithographic techniques for the manufacture of microelectronic devices is improved by the use of certain mixtures of organosilane silylating agents. The mixture includes a monofunctional silane in combination with a di- or polyfunctional silane, selected such that the boiling points are the same or very close to each other to facilitate a vapor-phase reaction. Silylation with this mixture provides effective penetration of the silane into the resist without causing so much lowering of the glass transition temperature of the resist that the resist flows under the processing steps and distorts the pattern.

US Patent:

52521346, Oct 12, 1993

Filed:

May 31, 1991

Appl. No.:

7/708421

Inventors:

Craig M. Stauffer - Santa Clara CA

International Classification:

C23C 1600

US Classification:

118726

Abstract:

An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.

US Patent:

53992008, Mar 21, 1995

Filed:

Mar 10, 1994

Appl. No.:

8/209090

Inventors:

Craig M. Stauffer - Santa Clara CA

International Classification:

C23C 1600

US Classification:

118726

Abstract:

An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.

US Patent:

55057829, Apr 9, 1996

Filed:

Apr 13, 1995

Appl. No.:

8/422186

Inventors:

Craig M. Stauffer - Santa Clara CA

International Classification:

C23C 1600

US Classification:

118726

Abstract:

An integrated module with a heated reservoir to vaporize liquid for semiconductor processes with liquid sources is presented. Shut-off valves and a proportioning pressure valve for controlling the flow of the vapor from the reservoir are mounted on the module for simple conduction heating of the valves. A capacitance manometer also mounted to the module also has its own heating elements. Condensation of the vapor is avoided and consistence performance and reliability is obtained.