Daniel Wayne Harris

US Patent:

6483336, Nov 19, 2002

Filed:

May 3, 2000

Appl. No.:

09/564591

Inventors:

Daniel L. Harris - Beaverton OR
Peter R. McCann - Beaverton OR

Assignee:

Cascade Microtech, Inc. - Beaverton OR

International Classification:

G01R 3126

US Classification:

324765, 324758, 324754, 269 21

Abstract:

The arrangement of test points on an integrated circuit (IC) undergoing testing in a probe station often requires rotation of the IC or the probes when performing a series of tests. A chuck with indexed rotation promotes rapid rotation of the device under test to a new test position and increases the productivity of the probe station. The device under test is mounted on a device mounting member that is affixed to a shaft rotationally mounted in a base. A resilient seal supports the device mounting member and forms a sealed chamber over a substantial part of the area of the device mounting member. Applying vacuum or pressure to the sealed chamber urges the device mounting member and base toward contact. The support provided by the resilient seal over substantial portion of device mounting members diameter promotes stability and consistent planarity of the device mounting member without regard to the orientation of the shaft to device mounting member.

US Patent:

6771090, Aug 3, 2004

Filed:

Jun 24, 2002

Appl. No.:

10/179796

Inventors:

Daniel L. Harris - Beaverton OR
Peter R. McCann - Beaverton OR

Assignee:

Cascade Microtech, Inc. - Beaverton OR

International Classification:

G01R 3126

US Classification:

324765, 324537, 269 21

Abstract:

The arrangement of test points on an integrated circuit (IC) undergoing testing in a probe station often requires rotation of the IC or the probes when performing a series of tests. A chuck with indexed rotation promotes rapid rotation of the device under test to a new test position and increases the productivity of the probe station. The device under test is mounted on a device mounting member that is affixed to a shaft rotationally mounted in a base. A resilient seal supports the device mounting member and forms a sealed chamber over a substantial part of the area of the device mounting member. Applying vacuum or pressure to the sealed chamber urges the device mounting member and base toward contact. The support provided by the resilient seal over substantial portion of device mounting members diameter promotes stability and consistent planarity of the device mounting member without regard to the orientation of the shaft to device mounting member.

US Patent:

6836135, Dec 28, 2004

Filed:

Aug 7, 2002

Appl. No.:

10/214888

Inventors:

Daniel L. Harris - Beaverton OR
Peter R. McCann - Beaverton OR

Assignee:

Cascade Microtech, Inc. - Beaverton OR

International Classification:

G01R 3102

US Classification:

324765, 158754, 158758

Abstract:

A chuck adapted to test electrical and/or optical components on a device-under-test (DUT).

US Patent:

6885197, Apr 26, 2005

Filed:

May 28, 2004

Appl. No.:

10/856279

Inventors:

Daniel L. Harris - Beaverton OR, US
Peter R. McCann - Beaverton OR, US

Assignee:

Cascade Microtech, Inc. - Beaverton OR

International Classification:

H01H031/02
G01R031/02

US Classification:

324537, 324754

Abstract:

A rotary chuck with indexed rotation promotes rapid rotation of a device under test and increases the productivity of a probe station on which the device is being tested. A device mounting member of a rotatable chuck is supported for rotation on a first surface of a base until a vacuum is applied drawing the device mounting member into contact with a second surface of the base and constraining the device mounting member against rotation.

US Patent:

7268533, Sep 11, 2007

Filed:

Aug 6, 2004

Appl. No.:

10/912789

Inventors:

Daniel L. Harris - Beaverton OR, US
Peter R. McCann - Beaverton OR, US

Assignee:

Cascade Microtech, Inc. - Beaverton OR

International Classification:

G01R 31/02
B25B 11/00

US Classification:

3241581, 269 21

Abstract:

A chuck adapted to test electrical and/or optical components on a device-under-test (DUT).

US Patent:

20050127927, Jun 16, 2005

Filed:

Jan 25, 2005

Appl. No.:

11/043475

Inventors:

Daniel Harris - Beaverton OR, US
Peter McCann - Beaverton OR, US

International Classification:

G01R031/02

US Classification:

324754000

Abstract:

A rotary chuck with indexed rotation promotes rapid rotation of a device under test and increases the productivity of a probe station on which the device is being tested. A device mounting member of a rotatable chuck is supported for rotation on a first surface of a base until a vacuum is applied drawing the device mounting member into contact with a second surface of the base and constraining the device mounting member against rotation.

US Patent:

20070273387, Nov 29, 2007

Filed:

Aug 7, 2007

Appl. No.:

11/890987

Inventors:

Daniel Harris - Beaverton OR, US
Peter McCann - Beaverton OR, US

International Classification:

G01R 31/28

US Classification:

324537000

Abstract:

A chuck adapted to test electrical and/or optical components on a device-under-test (DUT).

US Patent:

62885553, Sep 11, 2001

Filed:

Mar 10, 1999

Appl. No.:

9/265201

Inventors:

Daniel L. Harris - Beaverton OR

Assignee:

Credence Systems Corporation - Fremont CA

International Classification:

G01R 2704
G01R 3102

US Classification:

324637

Abstract:

An electrical parameter of a rod-form conductive element is measured using a measurement fixture which includes an insulating support on which a first conductive element is mounted. A transmission line connector mounted on the insulating support and has a signal conductor connected to a first conductive element mounted on the support member. A holder for removably receiving the rod-form element includes a conductive member which is in electrically conductive contact with the rod-form element when the latter is positioned in the holder. The holder is mounted relative to the support member by a mounting structure such that when the rod-form element is positioned in the holder, an end of the rod-form element can be brought into electrically conductive contact with the first conductive element. The mounting structure includes a resistor structure electrically connected between the conductive member of the holder and the ground conductor of the transmission line connector and having an electrical resistance substantially equal to the characteristic impedance of the transmission line connector.