Daniel Hai Tao Hu

US Patent:

40273806, Jun 7, 1977

Filed:

Jan 16, 1976

Appl. No.:

5/649957

Inventors:

Bruce E. Deal - Palo Alto CA
Daniel C. Hu - San Jose CA

Assignee:

Fairchild Camera and Instrument Corporation - Mountain View CA

International Classification:

B01J 1700

US Classification:

29571

Abstract:

A complementary insulated gate field effect transistor structure having complementary p-channel and n-channel devices in the same semiconductor substrate and a process for fabricating the structure incorporate oxide isolation of the active device regions, counterdoping of the p-well with impurities of opposite type to obtain a composite doping profile, reduction of Q. sub. ss in the isolation oxide, doping of the gate and field oxides with a chlorine species and phosphorus doping of the polycrystalline silicon gates.

US Patent:

43476546, Sep 7, 1982

Filed:

Jun 18, 1980

Appl. No.:

6/160513

Inventors:

Bert L. Allen - Cupertino CA
Robert L. Wourms - Santa Clara CA
Daniel C. Hu - Saratoga CA

Assignee:

National Semiconductor Corporation - Santa Clara CA

International Classification:

H01L 21306
H01L 21265

US Classification:

29576B

Abstract:

A method of fabricating a high-frequency bipolar transistor structure wherein the emitter, higher impurity concentration base, and lower impurity concentration base regions are defined in a single masking operation. Permeation etching is used to etch regions of an oxide layer under a layer of resist which defines regions of the higher impurity concentration thereby simultaneously defining the emitter and lower impurity concentration base regions. The higher impurity concentration base regions are formed by ion implantation of impurities through the unetched oxide regions. The resist is then removed and the lower impurity concentration base and emitters are formed through the resulting opening in the oxide. This results in the self-aligning of the emitter regions with respect to the base regions.

Address:

166 Corona St, San Francisco, CA 94127

VIN:

2GCFK13Y871537869

Make:

CHEVROLET

Model:

SILVERADO 1500

Year:

2007